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- W1987536144 abstract "Highly textured, highly dense, superconducting YBa2Cu3O7−x thin films with mirror-like surfaces have been prepared, in situ, at a reduced substrate temperature as low as 570 °C by a remote microwave plasma-enhanced metalorganic chemical vapor deposition process (PE-MOCVD). Nitrous oxide was used as the oxidizer gas. The as-deposited films grown by PE-MOCVD show attainment of zero resistance at 72 K. PE-MOCVD was carried out in a commercial scale MOCVD reactor." @default.
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- W1987536144 date "1990-06-04" @default.
- W1987536144 modified "2023-09-26" @default.
- W1987536144 title "Low-temperature <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> formation of Y-Ba-Cu-O high <i>T</i> <i>c</i> superconducting thin films by plasma-enhanced metalorganic chemical vapor deposition" @default.
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- W1987536144 doi "https://doi.org/10.1063/1.103249" @default.
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