Matches in SemOpenAlex for { <https://semopenalex.org/work/W1987643409> ?p ?o ?g. }
- W1987643409 endingPage "045025" @default.
- W1987643409 startingPage "045025" @default.
- W1987643409 abstract "Various surface treatments are applied for surface oxide removal prior to wafer-level Cu-to-Cu thermo-compression bonding and the bonding quality is systematically analyzed in this work. Three methods are investigated: self-assembled monolayer (SAM) passivation, forming gas annealing and acetic acid wet cleaning. The surface conditions are carefully examined including roughness, contact angle and x-ray photoelectron spectroscopy (XPS) scan. The wafer pairs are bonded at 250 °C under a bonding force of 5500 N for a duration of 1 h in a vacuum environment. The bonding medium consists of a Cu (300 nm) bonding layer and a Ti (50 nm) barrier layer. The bonding quality investigation consists of two parts: hermeticity based on helium leak test and mechanical strength using four-point bending method. Although all samples under test with different surface treatment methods present an excellent hermetic seal and a robust mechanical support, the measurement results show that samples bonded after SAM passivation exhibit the best hermeticity and bonding strength for 3D integration application." @default.
- W1987643409 created "2016-06-24" @default.
- W1987643409 creator A5033317616 @default.
- W1987643409 creator A5042727705 @default.
- W1987643409 creator A5055093770 @default.
- W1987643409 date "2013-03-19" @default.
- W1987643409 modified "2023-10-01" @default.
- W1987643409 title "Effects of surface treatment on the bonding quality of wafer-level Cu-to-Cu thermo-compression bonding for 3D integration" @default.
- W1987643409 cites W1963792469 @default.
- W1987643409 cites W1969530042 @default.
- W1987643409 cites W1972746794 @default.
- W1987643409 cites W1979542923 @default.
- W1987643409 cites W2003978230 @default.
- W1987643409 cites W2032981902 @default.
- W1987643409 cites W2060406579 @default.
- W1987643409 cites W2070720201 @default.
- W1987643409 cites W2078286266 @default.
- W1987643409 cites W2082247553 @default.
- W1987643409 cites W2090506633 @default.
- W1987643409 cites W2091013611 @default.
- W1987643409 cites W2093085597 @default.
- W1987643409 cites W2117019713 @default.
- W1987643409 cites W2144327728 @default.
- W1987643409 cites W2155816545 @default.
- W1987643409 cites W2166141037 @default.
- W1987643409 cites W2168156588 @default.
- W1987643409 cites W2315045050 @default.
- W1987643409 doi "https://doi.org/10.1088/0960-1317/23/4/045025" @default.
- W1987643409 hasPublicationYear "2013" @default.
- W1987643409 type Work @default.
- W1987643409 sameAs 1987643409 @default.
- W1987643409 citedByCount "35" @default.
- W1987643409 countsByYear W19876434092014 @default.
- W1987643409 countsByYear W19876434092015 @default.
- W1987643409 countsByYear W19876434092016 @default.
- W1987643409 countsByYear W19876434092017 @default.
- W1987643409 countsByYear W19876434092018 @default.
- W1987643409 countsByYear W19876434092019 @default.
- W1987643409 countsByYear W19876434092020 @default.
- W1987643409 countsByYear W19876434092021 @default.
- W1987643409 countsByYear W19876434092022 @default.
- W1987643409 countsByYear W19876434092023 @default.
- W1987643409 crossrefType "journal-article" @default.
- W1987643409 hasAuthorship W1987643409A5033317616 @default.
- W1987643409 hasAuthorship W1987643409A5042727705 @default.
- W1987643409 hasAuthorship W1987643409A5055093770 @default.
- W1987643409 hasConcept C107365816 @default.
- W1987643409 hasConcept C115537861 @default.
- W1987643409 hasConcept C127413603 @default.
- W1987643409 hasConcept C159985019 @default.
- W1987643409 hasConcept C160671074 @default.
- W1987643409 hasConcept C171250308 @default.
- W1987643409 hasConcept C175708663 @default.
- W1987643409 hasConcept C191897082 @default.
- W1987643409 hasConcept C192562407 @default.
- W1987643409 hasConcept C201414436 @default.
- W1987643409 hasConcept C201845621 @default.
- W1987643409 hasConcept C2777855556 @default.
- W1987643409 hasConcept C2779133538 @default.
- W1987643409 hasConcept C2779227376 @default.
- W1987643409 hasConcept C2779851234 @default.
- W1987643409 hasConcept C33574316 @default.
- W1987643409 hasConcept C42360764 @default.
- W1987643409 hasConceptScore W1987643409C107365816 @default.
- W1987643409 hasConceptScore W1987643409C115537861 @default.
- W1987643409 hasConceptScore W1987643409C127413603 @default.
- W1987643409 hasConceptScore W1987643409C159985019 @default.
- W1987643409 hasConceptScore W1987643409C160671074 @default.
- W1987643409 hasConceptScore W1987643409C171250308 @default.
- W1987643409 hasConceptScore W1987643409C175708663 @default.
- W1987643409 hasConceptScore W1987643409C191897082 @default.
- W1987643409 hasConceptScore W1987643409C192562407 @default.
- W1987643409 hasConceptScore W1987643409C201414436 @default.
- W1987643409 hasConceptScore W1987643409C201845621 @default.
- W1987643409 hasConceptScore W1987643409C2777855556 @default.
- W1987643409 hasConceptScore W1987643409C2779133538 @default.
- W1987643409 hasConceptScore W1987643409C2779227376 @default.
- W1987643409 hasConceptScore W1987643409C2779851234 @default.
- W1987643409 hasConceptScore W1987643409C33574316 @default.
- W1987643409 hasConceptScore W1987643409C42360764 @default.
- W1987643409 hasIssue "4" @default.
- W1987643409 hasLocation W19876434091 @default.
- W1987643409 hasOpenAccess W1987643409 @default.
- W1987643409 hasPrimaryLocation W19876434091 @default.
- W1987643409 hasRelatedWork W1977747200 @default.
- W1987643409 hasRelatedWork W1986456852 @default.
- W1987643409 hasRelatedWork W2028462573 @default.
- W1987643409 hasRelatedWork W2043772030 @default.
- W1987643409 hasRelatedWork W2352335320 @default.
- W1987643409 hasRelatedWork W2529334993 @default.
- W1987643409 hasRelatedWork W2532494584 @default.
- W1987643409 hasRelatedWork W4286571765 @default.
- W1987643409 hasRelatedWork W4292829104 @default.
- W1987643409 hasRelatedWork W2523055230 @default.
- W1987643409 hasVolume "23" @default.
- W1987643409 isParatext "false" @default.
- W1987643409 isRetracted "false" @default.
- W1987643409 magId "1987643409" @default.