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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1987656437> ?p ?o ?g. }

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• W1987656437 abstract "Heavily carbon-doped GaAs was obtained by low-pressure metalorganic chemical vapor deposition by using trimethylgallium and arsine with a low V/III ratio. The hole concentration became as high as 2×1019 cm−3 without using intentional doping source gases when the V/III ratio was decreased to 2.4. The hole concentration coincided with the carbon concentration measured by secondary-ion mass spectroscopy. The epilayer surface tended to be rough when the V/III ratio was decreased below 10. However, when the V/III ratio was lowered to 2.4, the epilayer surface became completely mirror-like." @default.
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• W1987656437 date "1990-03-26" @default.
• W1987656437 modified "2023-09-24" @default.
• W1987656437 title "Heavy carbon doping in metalorganic chemical vapor deposition for GaAs using a low V/III ratio" @default.
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• W1987656437 doi "https://doi.org/10.1063/1.103181" @default.
• W1987656437 hasPublicationYear "1990" @default.
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