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- W1987795841 abstract "We synthesized a series of i- and g-line sensitive non-ionic photoacid generators (PAGs). Photolysis and catalytic properties of the PAGs were examined. Photoreactivity of the PAGs was evaluated using UV-vis spectroscopy. The PAGs were used for photocrosslinking of epoxy-based polymers. The PAGs were also applied to positive-type photoresist materials. Sensitivity profile of the photoresists containing PAGs was affected not only by the photosensitivity of PAGs but also by the acidity of the generated acid. Post-exposure delay of the photoresists was dependent on the molecular size of the generated acid." @default.
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- W1987795841 date "2003-01-01" @default.
- W1987795841 modified "2023-10-16" @default.
- W1987795841 title "Synthesis of i- and g-Line Sensitive Photoacid Generators and Their Application to Photopolymer Systems" @default.
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- W1987795841 doi "https://doi.org/10.2494/photopolymer.16.91" @default.
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