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• W1987818602 endingPage "206" @default.
• W1987818602 startingPage "198" @default.
• W1987818602 abstract "We have studied the experimental conditions to obtain highly boron-doped thin layers (-doping) in Si and SiGe during gas source molecular beam epitaxy (GSMBE). Pre-deposition and the co-deposition of boron have been compared by secondary ion mass spectroscopy (SIMS) and electrochemical capacitance-voltage profiling eC(V). We have shown that provided a pre-deposition step is used before co-deposition, higher doping levels are obtained without degrading the abruptness of the interfaces. This is explained by a coverage limit of boron during the pre-deposition step, above which islanding occurs and degrades the crystalline quality of the film. In addition, a reflection high-energy electron diffraction (RHEED) oscillation study shows that there exists a virtually constant boron coverage of the surface during the Si and SiGe overgrowth, which produces a decrease of the growth rate." @default.
• W1987818602 created "2016-06-24" @default.
• W1987818602 creator A5002023780 @default.
• W1987818602 creator A5014064296 @default.
• W1987818602 creator A5048669370 @default.
• W1987818602 creator A5064420528 @default.
• W1987818602 date "1999-01-01" @default.
• W1987818602 modified "2023-09-25" @default.
• W1987818602 title "Self-limiting segregation and incorporation during boron doping of Si and SiGe" @default.
• W1987818602 cites W1541835066 @default.
• W1987818602 cites W1965088015 @default.
• W1987818602 cites W1975181396 @default.
• W1987818602 cites W1976724161 @default.
• W1987818602 cites W1977973981 @default.
• W1987818602 cites W1982153874 @default.
• W1987818602 cites W1984942193 @default.
• W1987818602 cites W1988986427 @default.
• W1987818602 cites W1989640912 @default.
• W1987818602 cites W1991350298 @default.
• W1987818602 cites W1996605402 @default.
• W1987818602 cites W2010870327 @default.
• W1987818602 cites W2018370897 @default.
• W1987818602 cites W2022313091 @default.
• W1987818602 cites W2023685793 @default.
• W1987818602 cites W2024640776 @default.
• W1987818602 cites W2025388210 @default.
• W1987818602 cites W2033549388 @default.
• W1987818602 cites W2036083875 @default.
• W1987818602 cites W2037572636 @default.
• W1987818602 cites W2037677104 @default.
• W1987818602 cites W2038339683 @default.
• W1987818602 cites W2040731443 @default.
• W1987818602 cites W2044938692 @default.
• W1987818602 cites W2046274613 @default.
• W1987818602 cites W2065516818 @default.
• W1987818602 cites W2068541776 @default.
• W1987818602 cites W2073990407 @default.
• W1987818602 cites W2077350185 @default.
• W1987818602 cites W2081701162 @default.
• W1987818602 cites W2086003848 @default.
• W1987818602 cites W2088966120 @default.
• W1987818602 cites W2094267526 @default.
• W1987818602 cites W2116462494 @default.
• W1987818602 doi "https://doi.org/10.1088/0268-1242/14/2/015" @default.
• W1987818602 hasPublicationYear "1999" @default.
• W1987818602 type Work @default.
• W1987818602 sameAs 1987818602 @default.
• W1987818602 citedByCount "11" @default.
• W1987818602 countsByYear W19878186022014 @default.
• W1987818602 countsByYear W19878186022015 @default.
• W1987818602 countsByYear W19878186022018 @default.
• W1987818602 crossrefType "journal-article" @default.
• W1987818602 hasAuthorship W1987818602A5002023780 @default.
• W1987818602 hasAuthorship W1987818602A5014064296 @default.
• W1987818602 hasAuthorship W1987818602A5048669370 @default.
• W1987818602 hasAuthorship W1987818602A5064420528 @default.
• W1987818602 hasConcept C110738630 @default.
• W1987818602 hasConcept C113196181 @default.
• W1987818602 hasConcept C120665830 @default.
• W1987818602 hasConcept C121332964 @default.
• W1987818602 hasConcept C151730666 @default.
• W1987818602 hasConcept C171250308 @default.
• W1987818602 hasConcept C178790620 @default.
• W1987818602 hasConcept C185592680 @default.
• W1987818602 hasConcept C19067145 @default.
• W1987818602 hasConcept C192562407 @default.
• W1987818602 hasConcept C200096950 @default.
• W1987818602 hasConcept C207114421 @default.
• W1987818602 hasConcept C2779227376 @default.
• W1987818602 hasConcept C2816523 @default.
• W1987818602 hasConcept C3792809 @default.
• W1987818602 hasConcept C43617362 @default.
• W1987818602 hasConcept C49040817 @default.
• W1987818602 hasConcept C501308230 @default.
• W1987818602 hasConcept C544956773 @default.
• W1987818602 hasConcept C57863236 @default.
• W1987818602 hasConcept C64297162 @default.
• W1987818602 hasConcept C77557913 @default.
• W1987818602 hasConcept C86803240 @default.
• W1987818602 hasConceptScore W1987818602C110738630 @default.
• W1987818602 hasConceptScore W1987818602C113196181 @default.
• W1987818602 hasConceptScore W1987818602C120665830 @default.
• W1987818602 hasConceptScore W1987818602C121332964 @default.
• W1987818602 hasConceptScore W1987818602C151730666 @default.
• W1987818602 hasConceptScore W1987818602C171250308 @default.
• W1987818602 hasConceptScore W1987818602C178790620 @default.
• W1987818602 hasConceptScore W1987818602C185592680 @default.
• W1987818602 hasConceptScore W1987818602C19067145 @default.
• W1987818602 hasConceptScore W1987818602C192562407 @default.
• W1987818602 hasConceptScore W1987818602C200096950 @default.
• W1987818602 hasConceptScore W1987818602C207114421 @default.
• W1987818602 hasConceptScore W1987818602C2779227376 @default.
• W1987818602 hasConceptScore W1987818602C2816523 @default.
• W1987818602 hasConceptScore W1987818602C3792809 @default.
• W1987818602 hasConceptScore W1987818602C43617362 @default.
• W1987818602 hasConceptScore W1987818602C49040817 @default.
• W1987818602 hasConceptScore W1987818602C501308230 @default.
• W1987818602 hasConceptScore W1987818602C544956773 @default.

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