FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1988092023> ?p ?o ?g. }

• W1988092023 abstract "The density of charge trapping centers in SiNx:H films deposited by plasma enhanced chemical vapor deposition is investigated as a function of film stoichiometry and postdeposition annealing treatments. In the as-deposited films, the defect density is observed to increase with an increasing N/Si ratio x in the range of 0.89–1.45, and to correlate with the N–H bond density. Following the annealing in the temperature range of 500–800 °C, the defect density increases for all N/Si ratios, with the largest increase observed in the most Si rich samples. However, the defect density always remains highest in the most N rich films. The better charge storage ability suggests the N rich films are more suitable for the creation of negatively charged nitride films on solar cells." @default.
• W1988092023 created "2016-06-24" @default.
• W1988092023 creator A5026177093 @default.
• W1988092023 creator A5039733411 @default.
• W1988092023 creator A5055341082 @default.
• W1988092023 creator A5078589804 @default.
• W1988092023 date "2010-11-15" @default.
• W1988092023 modified "2023-10-16" @default.
• W1988092023 title "Effect of deposition conditions and thermal annealing on the charge trapping properties of SiNx films" @default.
• W1988092023 cites W1562330536 @default.
• W1988092023 cites W1969464536 @default.
• W1988092023 cites W1969495435 @default.
• W1988092023 cites W1980472207 @default.
• W1988092023 cites W1994165649 @default.
• W1988092023 cites W1996005286 @default.
• W1988092023 cites W2004130109 @default.
• W1988092023 cites W2016298601 @default.
• W1988092023 cites W2025469503 @default.
• W1988092023 cites W2039406861 @default.
• W1988092023 cites W2062505833 @default.
• W1988092023 cites W2065822386 @default.
• W1988092023 cites W2070336550 @default.
• W1988092023 cites W2075547358 @default.
• W1988092023 cites W2084678614 @default.
• W1988092023 cites W2090429552 @default.
• W1988092023 cites W2092072975 @default.
• W1988092023 cites W2092764428 @default.
• W1988092023 cites W2093098111 @default.
• W1988092023 cites W2133980904 @default.
• W1988092023 cites W2135796605 @default.
• W1988092023 doi "https://doi.org/10.1063/1.3518488" @default.
• W1988092023 hasPublicationYear "2010" @default.
• W1988092023 type Work @default.
• W1988092023 sameAs 1988092023 @default.
• W1988092023 citedByCount "20" @default.
• W1988092023 countsByYear W19880920232012 @default.
• W1988092023 countsByYear W19880920232013 @default.
• W1988092023 countsByYear W19880920232014 @default.
• W1988092023 countsByYear W19880920232015 @default.
• W1988092023 countsByYear W19880920232017 @default.
• W1988092023 countsByYear W19880920232019 @default.
• W1988092023 countsByYear W19880920232021 @default.
• W1988092023 countsByYear W19880920232022 @default.
• W1988092023 crossrefType "journal-article" @default.
• W1988092023 hasAuthorship W1988092023A5026177093 @default.
• W1988092023 hasAuthorship W1988092023A5039733411 @default.
• W1988092023 hasAuthorship W1988092023A5055341082 @default.
• W1988092023 hasAuthorship W1988092023A5078589804 @default.
• W1988092023 hasConcept C113196181 @default.
• W1988092023 hasConcept C121332964 @default.
• W1988092023 hasConcept C144082473 @default.
• W1988092023 hasConcept C147789679 @default.
• W1988092023 hasConcept C150708132 @default.
• W1988092023 hasConcept C159985019 @default.
• W1988092023 hasConcept C171250308 @default.
• W1988092023 hasConcept C185592680 @default.
• W1988092023 hasConcept C18903297 @default.
• W1988092023 hasConcept C19067145 @default.
• W1988092023 hasConcept C192562407 @default.
• W1988092023 hasConcept C194760766 @default.
• W1988092023 hasConcept C2777431650 @default.
• W1988092023 hasConcept C2777855556 @default.
• W1988092023 hasConcept C2777924906 @default.
• W1988092023 hasConcept C2779227376 @default.
• W1988092023 hasConcept C43617362 @default.
• W1988092023 hasConcept C49040817 @default.
• W1988092023 hasConcept C544956773 @default.
• W1988092023 hasConcept C57410435 @default.
• W1988092023 hasConcept C62520636 @default.
• W1988092023 hasConcept C86803240 @default.
• W1988092023 hasConceptScore W1988092023C113196181 @default.
• W1988092023 hasConceptScore W1988092023C121332964 @default.
• W1988092023 hasConceptScore W1988092023C144082473 @default.
• W1988092023 hasConceptScore W1988092023C147789679 @default.
• W1988092023 hasConceptScore W1988092023C150708132 @default.
• W1988092023 hasConceptScore W1988092023C159985019 @default.
• W1988092023 hasConceptScore W1988092023C171250308 @default.
• W1988092023 hasConceptScore W1988092023C185592680 @default.
• W1988092023 hasConceptScore W1988092023C18903297 @default.
• W1988092023 hasConceptScore W1988092023C19067145 @default.
• W1988092023 hasConceptScore W1988092023C192562407 @default.
• W1988092023 hasConceptScore W1988092023C194760766 @default.
• W1988092023 hasConceptScore W1988092023C2777431650 @default.
• W1988092023 hasConceptScore W1988092023C2777855556 @default.
• W1988092023 hasConceptScore W1988092023C2777924906 @default.
• W1988092023 hasConceptScore W1988092023C2779227376 @default.
• W1988092023 hasConceptScore W1988092023C43617362 @default.
• W1988092023 hasConceptScore W1988092023C49040817 @default.
• W1988092023 hasConceptScore W1988092023C544956773 @default.
• W1988092023 hasConceptScore W1988092023C57410435 @default.
• W1988092023 hasConceptScore W1988092023C62520636 @default.
• W1988092023 hasConceptScore W1988092023C86803240 @default.
• W1988092023 hasIssue "20" @default.
• W1988092023 hasLocation W19880920231 @default.
• W1988092023 hasOpenAccess W1988092023 @default.
• W1988092023 hasPrimaryLocation W19880920231 @default.
• W1988092023 hasRelatedWork W1532252538 @default.
• W1988092023 hasRelatedWork W1982526145 @default.
• W1988092023 hasRelatedWork W1985064754 @default.
• W1988092023 hasRelatedWork W2042925312 @default.

• next