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- W1988331043 abstract "In this paper, Beam Propagation Method (BPM) with Fast Fourier Transforms(FFT) is employed to efficiently calculate the diffract image in the wafer plane for both conventional and second generation synchrotron-based proximity x-ray lithography(PXL). In the simulation, a dark-field isolated space pattern silicon nitride/Ta x-ray mask is used for conventional PXL and a diamond /Ta x-ray mask is used for second generation PXL, the diffract image’s dependency on absorber thickness, mask-wafer gap, effective total blur, linewidth and absorber sidewall slope has been numerically evaluated. For conventional PXL, in order to obtain a isolated trench resolution of 50nm, the mask-wafer gap should be controlled below 5 micron, the optimization condition is mask-wafer gap 5 micron, Ta absorber thickness 300nm, effective total blur 10nm, absorber sidewall slope 3°, the corresponding aerial image contrast is 0.457; For second generation, in order to obtain a isolated trench resolution of 50nm, the mask-wafer gap can be as large as 10 micron. In order to obtain a isolated trench resolution of 35nm, mask-wafer gap should be controlled below 5 micron." @default.
- W1988331043 created "2016-06-24" @default.
- W1988331043 creator A5008918891 @default.
- W1988331043 creator A5042112278 @default.
- W1988331043 creator A5060718181 @default.
- W1988331043 creator A5066202277 @default.
- W1988331043 creator A5076703061 @default.
- W1988331043 date "2005-01-27" @default.
- W1988331043 modified "2023-09-24" @default.
- W1988331043 title "Analysis of nanometer-isolated trench diffract aerial image of both conventional and second-generation synchrotron-based proximity x-ray lithography" @default.
- W1988331043 doi "https://doi.org/10.1117/12.573232" @default.
- W1988331043 hasPublicationYear "2005" @default.
- W1988331043 type Work @default.
- W1988331043 sameAs 1988331043 @default.
- W1988331043 citedByCount "1" @default.
- W1988331043 countsByYear W19883310432015 @default.
- W1988331043 crossrefType "proceedings-article" @default.
- W1988331043 hasAuthorship W1988331043A5008918891 @default.
- W1988331043 hasAuthorship W1988331043A5042112278 @default.
- W1988331043 hasAuthorship W1988331043A5060718181 @default.
- W1988331043 hasAuthorship W1988331043A5066202277 @default.
- W1988331043 hasAuthorship W1988331043A5076703061 @default.
- W1988331043 hasConcept C105487726 @default.
- W1988331043 hasConcept C115961682 @default.
- W1988331043 hasConcept C120665830 @default.
- W1988331043 hasConcept C121332964 @default.
- W1988331043 hasConcept C142181693 @default.
- W1988331043 hasConcept C154945302 @default.
- W1988331043 hasConcept C155310634 @default.
- W1988331043 hasConcept C160671074 @default.
- W1988331043 hasConcept C171250308 @default.
- W1988331043 hasConcept C192562407 @default.
- W1988331043 hasConcept C204223013 @default.
- W1988331043 hasConcept C207114421 @default.
- W1988331043 hasConcept C2776429412 @default.
- W1988331043 hasConcept C2779227376 @default.
- W1988331043 hasConcept C41008148 @default.
- W1988331043 hasConcept C41794268 @default.
- W1988331043 hasConcept C49040817 @default.
- W1988331043 hasConcept C520434653 @default.
- W1988331043 hasConcept C53524968 @default.
- W1988331043 hasConceptScore W1988331043C105487726 @default.
- W1988331043 hasConceptScore W1988331043C115961682 @default.
- W1988331043 hasConceptScore W1988331043C120665830 @default.
- W1988331043 hasConceptScore W1988331043C121332964 @default.
- W1988331043 hasConceptScore W1988331043C142181693 @default.
- W1988331043 hasConceptScore W1988331043C154945302 @default.
- W1988331043 hasConceptScore W1988331043C155310634 @default.
- W1988331043 hasConceptScore W1988331043C160671074 @default.
- W1988331043 hasConceptScore W1988331043C171250308 @default.
- W1988331043 hasConceptScore W1988331043C192562407 @default.
- W1988331043 hasConceptScore W1988331043C204223013 @default.
- W1988331043 hasConceptScore W1988331043C207114421 @default.
- W1988331043 hasConceptScore W1988331043C2776429412 @default.
- W1988331043 hasConceptScore W1988331043C2779227376 @default.
- W1988331043 hasConceptScore W1988331043C41008148 @default.
- W1988331043 hasConceptScore W1988331043C41794268 @default.
- W1988331043 hasConceptScore W1988331043C49040817 @default.
- W1988331043 hasConceptScore W1988331043C520434653 @default.
- W1988331043 hasConceptScore W1988331043C53524968 @default.
- W1988331043 hasLocation W19883310431 @default.
- W1988331043 hasOpenAccess W1988331043 @default.
- W1988331043 hasPrimaryLocation W19883310431 @default.
- W1988331043 hasRelatedWork W1932004952 @default.
- W1988331043 hasRelatedWork W1965417992 @default.
- W1988331043 hasRelatedWork W2022331525 @default.
- W1988331043 hasRelatedWork W2023543647 @default.
- W1988331043 hasRelatedWork W2040471795 @default.
- W1988331043 hasRelatedWork W2069952959 @default.
- W1988331043 hasRelatedWork W2071910516 @default.
- W1988331043 hasRelatedWork W2464839408 @default.
- W1988331043 hasRelatedWork W2990862033 @default.
- W1988331043 hasRelatedWork W3053914760 @default.
- W1988331043 isParatext "false" @default.
- W1988331043 isRetracted "false" @default.
- W1988331043 magId "1988331043" @default.
- W1988331043 workType "article" @default.