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- W1988372010 abstract "A vertical spring-type micromirror was fabricated using a SiO<SUB>2</SUB> shielding screen structure. The fabricated vertical springs are well defined but the mirror plate is bent because the mirror plate is composed of SiO<SUB>2</SUB> and aluminum layers. To obtain a flat mirror plate, the stress of SiO<SUB>2</SUB> and aluminum is analyzed and the bending deflection of mirror plate's edge is measured. The measured deflection varies with the thickness of aluminum. Another SiO<SUB>2</SUB> layer on the mirror aluminum improved the flatness of mirror plate." @default.
- W1988372010 created "2016-06-24" @default.
- W1988372010 creator A5053722963 @default.
- W1988372010 creator A5083760530 @default.
- W1988372010 date "1999-09-29" @default.
- W1988372010 modified "2023-10-16" @default.
- W1988372010 title "<title>Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate</title>" @default.
- W1988372010 doi "https://doi.org/10.1117/12.364447" @default.
- W1988372010 hasPublicationYear "1999" @default.
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