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- W1988408278 abstract "Metal containing hydrogen free nanocrystalline structured carbon (Me:nc-C) films were synthesized by closed-field unbalanced magnetron sputtering system (CFUBM). The aim of this study was to determine the relationship between the microstructure and physical properties of Me:nc-C films as a function of the concentration of materials. The film structures were examined by x-ray photoelectron spectroscopy and high resolution transmission electron microscopy. The physical properties of the Me:nc-C films were evaluated by using a 4-point probe. The fraction of graphite clusters was found to be increased by containing titanium and the electrical resistivity decreased with increasing amount of containing." @default.
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- W1988408278 date "2007-04-30" @default.
- W1988408278 modified "2023-09-27" @default.
- W1988408278 title "Microstructure and Physical Properties of Sputtered Metal Containing Nanocrystalline Structured Carbon Coatings" @default.
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- W1988408278 doi "https://doi.org/10.5695/jkise.2007.40.2.059" @default.
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