Matches in SemOpenAlex for { <https://semopenalex.org/work/W1988434137> ?p ?o ?g. }
- W1988434137 endingPage "5041" @default.
- W1988434137 startingPage "5035" @default.
- W1988434137 abstract "Abstract Tetrakis(ethylmethylamido)hafnium and water are commonly used precursors for atomic layer deposition of HfO 2 . Using reflection absorption infrared spectroscopy with a buried-metal-layer substrate, we probe surface species present during typical deposition conditions. We observe evidence for thermal decomposition of alkylamido ligands at 320 °C. Additionally, we find that complete saturation of the SiO 2 substrate occurs in the first cycle at ≈100 °C whereas incomplete coverage is apparent even after many cycles at higher temperatures. The use of this technique as an in situ diagnostic useful for process optimization is demonstrated." @default.
- W1988434137 created "2016-06-24" @default.
- W1988434137 creator A5042503031 @default.
- W1988434137 creator A5086152712 @default.
- W1988434137 creator A5088767290 @default.
- W1988434137 date "2010-06-01" @default.
- W1988434137 modified "2023-10-10" @default.
- W1988434137 title "Reflection absorption infrared spectroscopy during atomic layer deposition of HfO2 films from tetrakis(ethylmethylamido)hafnium and water" @default.
- W1988434137 cites W1974359614 @default.
- W1988434137 cites W1974530262 @default.
- W1988434137 cites W1976606328 @default.
- W1988434137 cites W1977672349 @default.
- W1988434137 cites W1978387625 @default.
- W1988434137 cites W1980523941 @default.
- W1988434137 cites W1984449946 @default.
- W1988434137 cites W1997094062 @default.
- W1988434137 cites W2004401661 @default.
- W1988434137 cites W2005354011 @default.
- W1988434137 cites W2010330421 @default.
- W1988434137 cites W2011764801 @default.
- W1988434137 cites W2021386913 @default.
- W1988434137 cites W2022429969 @default.
- W1988434137 cites W2022514800 @default.
- W1988434137 cites W2034028123 @default.
- W1988434137 cites W2037607670 @default.
- W1988434137 cites W2042343170 @default.
- W1988434137 cites W2052243302 @default.
- W1988434137 cites W2057742828 @default.
- W1988434137 cites W2061882567 @default.
- W1988434137 cites W2061985841 @default.
- W1988434137 cites W2064194038 @default.
- W1988434137 cites W2068249473 @default.
- W1988434137 cites W2070645121 @default.
- W1988434137 cites W2070653146 @default.
- W1988434137 cites W2072759665 @default.
- W1988434137 cites W2089653545 @default.
- W1988434137 cites W2105574656 @default.
- W1988434137 cites W2115508031 @default.
- W1988434137 cites W2164751111 @default.
- W1988434137 cites W2316851180 @default.
- W1988434137 cites W2048121689 @default.
- W1988434137 doi "https://doi.org/10.1016/j.apsusc.2010.03.050" @default.
- W1988434137 hasPublicationYear "2010" @default.
- W1988434137 type Work @default.
- W1988434137 sameAs 1988434137 @default.
- W1988434137 citedByCount "19" @default.
- W1988434137 countsByYear W19884341372012 @default.
- W1988434137 countsByYear W19884341372013 @default.
- W1988434137 countsByYear W19884341372014 @default.
- W1988434137 countsByYear W19884341372015 @default.
- W1988434137 countsByYear W19884341372017 @default.
- W1988434137 countsByYear W19884341372018 @default.
- W1988434137 countsByYear W19884341372020 @default.
- W1988434137 countsByYear W19884341372021 @default.
- W1988434137 countsByYear W19884341372022 @default.
- W1988434137 countsByYear W19884341372023 @default.
- W1988434137 crossrefType "journal-article" @default.
- W1988434137 hasAuthorship W1988434137A5042503031 @default.
- W1988434137 hasAuthorship W1988434137A5086152712 @default.
- W1988434137 hasAuthorship W1988434137A5088767290 @default.
- W1988434137 hasConcept C107872376 @default.
- W1988434137 hasConcept C113196181 @default.
- W1988434137 hasConcept C119824511 @default.
- W1988434137 hasConcept C120665830 @default.
- W1988434137 hasConcept C121332964 @default.
- W1988434137 hasConcept C125287762 @default.
- W1988434137 hasConcept C127313418 @default.
- W1988434137 hasConcept C151730666 @default.
- W1988434137 hasConcept C153642686 @default.
- W1988434137 hasConcept C158355884 @default.
- W1988434137 hasConcept C159985019 @default.
- W1988434137 hasConcept C171250308 @default.
- W1988434137 hasConcept C178790620 @default.
- W1988434137 hasConcept C179104552 @default.
- W1988434137 hasConcept C185592680 @default.
- W1988434137 hasConcept C192562407 @default.
- W1988434137 hasConcept C199360897 @default.
- W1988434137 hasConcept C2779227376 @default.
- W1988434137 hasConcept C2816523 @default.
- W1988434137 hasConcept C32891209 @default.
- W1988434137 hasConcept C41008148 @default.
- W1988434137 hasConcept C534791751 @default.
- W1988434137 hasConcept C546638069 @default.
- W1988434137 hasConcept C62520636 @default.
- W1988434137 hasConcept C64297162 @default.
- W1988434137 hasConcept C65682993 @default.
- W1988434137 hasConcept C69544855 @default.
- W1988434137 hasConceptScore W1988434137C107872376 @default.
- W1988434137 hasConceptScore W1988434137C113196181 @default.
- W1988434137 hasConceptScore W1988434137C119824511 @default.
- W1988434137 hasConceptScore W1988434137C120665830 @default.
- W1988434137 hasConceptScore W1988434137C121332964 @default.
- W1988434137 hasConceptScore W1988434137C125287762 @default.
- W1988434137 hasConceptScore W1988434137C127313418 @default.
- W1988434137 hasConceptScore W1988434137C151730666 @default.
- W1988434137 hasConceptScore W1988434137C153642686 @default.
- W1988434137 hasConceptScore W1988434137C158355884 @default.
- W1988434137 hasConceptScore W1988434137C159985019 @default.