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• W1988453278 endingPage "022019" @default.
• W1988453278 startingPage "022019" @default.
• W1988453278 abstract "Superconducting quantum interference devices (SQUIDs) with nano (micro)-meter dimensions are called nano (micro)-SQUIDs. The high sensitivity for flux and position of nano (micro)-SQUIDs can be applied to detect local magnetic fields induced by vortices and the magnetization of mesoscopic superconductors. Nano-SQUIDs based on carbon-nanotube junctions and niobium weak junctions are well known. However, such nano-SQUIDs are not suitable for large-scale integrated circuits and mass production. Therefore, we employ a combination of lithography using the Niemeyer-Dolan technique and the inductively coupled plasma reactive-ion etching technique to fabricate nano-SQUIDs. Here, we report the fabrication of nano (micro)-SQUIDs based on superconducting aluminum tunnel junctions and their application for vortex formation into mesoscopic chiral superconducting Sr2RuO4[1-3]." @default.
• W1988453278 created "2016-06-24" @default.
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• W1988453278 date "2014-12-08" @default.
• W1988453278 modified "2023-10-18" @default.
• W1988453278 title "Development of nano and micro SQUIDs based on Al tunnel junctions" @default.
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• W1988453278 doi "https://doi.org/10.1088/1742-6596/568/2/022019" @default.
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