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• W1988636847 endingPage "G162" @default.
• W1988636847 startingPage "G162" @default.
• W1988636847 abstract "Thin Zr-doped HfO2 high-k thin film with an equivalent oxide thickness less than 2 nm has been prepared by including ruthenium into the structure. In addition to forming discrete ruthenium nanoparticles in the amorphous Zr-doped HfO2 film, the bulk and interfacial properties, e.g., density of oxygen vacancies and layer composition, were changed with the addition of ruthenium. The permittivity of the film was increased due to the dipole enhancement, which was supported from the frequency-dependent capacitance-voltage and the conductance-voltage measurements change. The ruthenium modified ZrHfO film has a leakage current density 5 orders of magnitude lower than that of the thermally grown SiO2 with the same equivalent oxide thickness. The Schottky emission mechanism was observed in the low electric field regime while the Frenkel-Poole conduction mechanism was applicable in the high electric field regime. A 10-year life expectance is estimated at the gate voltage of 2 V." @default.
• W1988636847 created "2016-06-24" @default.
• W1988636847 creator A5000566608 @default.
• W1988636847 creator A5062601761 @default.
• W1988636847 date "2011-01-01" @default.
• W1988636847 modified "2023-09-24" @default.
• W1988636847 title "Ruthenium Modified Zr-Doped HfO2 High-k Thin Films with Low Equivalent Oxide Thickness" @default.
• W1988636847 cites W1510739873 @default.
• W1988636847 cites W1665148940 @default.
• W1988636847 cites W1968304296 @default.
• W1988636847 cites W1970117005 @default.
• W1988636847 cites W1970200102 @default.
• W1988636847 cites W1978821392 @default.
• W1988636847 cites W1996411428 @default.
• W1988636847 cites W2000894254 @default.
• W1988636847 cites W2010754280 @default.
• W1988636847 cites W2011048136 @default.
• W1988636847 cites W2014231066 @default.
• W1988636847 cites W2019017977 @default.
• W1988636847 cites W2023470936 @default.
• W1988636847 cites W2028728817 @default.
• W1988636847 cites W2036475037 @default.
• W1988636847 cites W2041663197 @default.
• W1988636847 cites W2042585692 @default.
• W1988636847 cites W2042989495 @default.
• W1988636847 cites W2046211982 @default.
• W1988636847 cites W2055109641 @default.
• W1988636847 cites W2060215046 @default.
• W1988636847 cites W2060964173 @default.
• W1988636847 cites W2061476898 @default.
• W1988636847 cites W2073855249 @default.
• W1988636847 cites W2076614108 @default.
• W1988636847 cites W2079499708 @default.
• W1988636847 cites W2085772662 @default.
• W1988636847 cites W2087046260 @default.
• W1988636847 cites W2124402727 @default.
• W1988636847 cites W2136943806 @default.
• W1988636847 cites W2163651515 @default.
• W1988636847 cites W2166274113 @default.
• W1988636847 cites W2170323059 @default.
• W1988636847 cites W2490765418 @default.
• W1988636847 cites W2002266474 @default.
• W1988636847 doi "https://doi.org/10.1149/1.3592159" @default.
• W1988636847 hasPublicationYear "2011" @default.
• W1988636847 type Work @default.
• W1988636847 sameAs 1988636847 @default.
• W1988636847 citedByCount "13" @default.
• W1988636847 countsByYear W19886368472013 @default.
• W1988636847 countsByYear W19886368472014 @default.
• W1988636847 countsByYear W19886368472015 @default.
• W1988636847 countsByYear W19886368472016 @default.
• W1988636847 countsByYear W19886368472018 @default.
• W1988636847 countsByYear W19886368472021 @default.
• W1988636847 crossrefType "journal-article" @default.
• W1988636847 hasAuthorship W1988636847A5000566608 @default.
• W1988636847 hasAuthorship W1988636847A5062601761 @default.
• W1988636847 hasConcept C113196181 @default.
• W1988636847 hasConcept C119599485 @default.
• W1988636847 hasConcept C121332964 @default.
• W1988636847 hasConcept C127396331 @default.
• W1988636847 hasConcept C127413603 @default.
• W1988636847 hasConcept C133386390 @default.
• W1988636847 hasConcept C161790260 @default.
• W1988636847 hasConcept C165801399 @default.
• W1988636847 hasConcept C168651791 @default.
• W1988636847 hasConcept C171250308 @default.
• W1988636847 hasConcept C172385210 @default.
• W1988636847 hasConcept C185592680 @default.
• W1988636847 hasConcept C19067145 @default.
• W1988636847 hasConcept C191897082 @default.
• W1988636847 hasConcept C192562407 @default.
• W1988636847 hasConcept C2361726 @default.
• W1988636847 hasConcept C2777129649 @default.
• W1988636847 hasConcept C2779851234 @default.
• W1988636847 hasConcept C43617362 @default.
• W1988636847 hasConcept C49040817 @default.
• W1988636847 hasConcept C52780932 @default.
• W1988636847 hasConcept C55493867 @default.
• W1988636847 hasConcept C555196967 @default.
• W1988636847 hasConcept C56052488 @default.
• W1988636847 hasConcept C57863236 @default.
• W1988636847 hasConcept C60799052 @default.
• W1988636847 hasConcept C62520636 @default.
• W1988636847 hasConcept C8010536 @default.
• W1988636847 hasConceptScore W1988636847C113196181 @default.
• W1988636847 hasConceptScore W1988636847C119599485 @default.
• W1988636847 hasConceptScore W1988636847C121332964 @default.
• W1988636847 hasConceptScore W1988636847C127396331 @default.
• W1988636847 hasConceptScore W1988636847C127413603 @default.
• W1988636847 hasConceptScore W1988636847C133386390 @default.
• W1988636847 hasConceptScore W1988636847C161790260 @default.
• W1988636847 hasConceptScore W1988636847C165801399 @default.
• W1988636847 hasConceptScore W1988636847C168651791 @default.
• W1988636847 hasConceptScore W1988636847C171250308 @default.
• W1988636847 hasConceptScore W1988636847C172385210 @default.
• W1988636847 hasConceptScore W1988636847C185592680 @default.
• W1988636847 hasConceptScore W1988636847C19067145 @default.
• W1988636847 hasConceptScore W1988636847C191897082 @default.

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