Matches in SemOpenAlex for { <https://semopenalex.org/work/W1988819356> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W1988819356 abstract "Chemically amplified (CA) resist systems are known to be sensitive to contamination. Environmental contaminants such as airborne amines can result in T-topping. In addition, the undesired diffusion of photogenerated acid into unexposed areas can result in linewidth slimming. To counteract these effects, amines are intentionally added to chemically amplified resist formulations. These added amines function as `buffers' or `acid traps' within the resist matrix. While the effects of strong, photogenerated acids on CA resist systems has been the focus of much research, the effects of weaker acids on these resist systems has not received as much attention. In this paper we demonstrate how the conjugate acid of some amines (amine salts) can adversely effect the lithographic performance and storage stability of CA systems. We show that salts of weak amines are sufficiently acidic at relatively low temperatures, to cause significant increases in polymer molecular weight and polydispersity. In some cases, gelation of the polymer matrix was observed. A mechanism is proposed to explain these effects. We also show how appropriate amines can provide a thermally stable salt with low acidity. Such amine additives not only improve the storage stability of the resist system but also significantly improve lithographic performance as well." @default.
- W1988819356 created "2016-06-24" @default.
- W1988819356 creator A5026671987 @default.
- W1988819356 creator A5045143638 @default.
- W1988819356 creator A5050124257 @default.
- W1988819356 creator A5065551284 @default.
- W1988819356 creator A5081421002 @default.
- W1988819356 date "1998-06-29" @default.
- W1988819356 modified "2023-09-23" @default.
- W1988819356 title "Choice of amines as stabilizers for chemically amplified resist systems" @default.
- W1988819356 doi "https://doi.org/10.1117/12.312413" @default.
- W1988819356 hasPublicationYear "1998" @default.
- W1988819356 type Work @default.
- W1988819356 sameAs 1988819356 @default.
- W1988819356 citedByCount "3" @default.
- W1988819356 crossrefType "proceedings-article" @default.
- W1988819356 hasAuthorship W1988819356A5026671987 @default.
- W1988819356 hasAuthorship W1988819356A5045143638 @default.
- W1988819356 hasAuthorship W1988819356A5050124257 @default.
- W1988819356 hasAuthorship W1988819356A5065551284 @default.
- W1988819356 hasAuthorship W1988819356A5081421002 @default.
- W1988819356 hasConcept C106487976 @default.
- W1988819356 hasConcept C11432220 @default.
- W1988819356 hasConcept C127413603 @default.
- W1988819356 hasConcept C131779359 @default.
- W1988819356 hasConcept C171250308 @default.
- W1988819356 hasConcept C178790620 @default.
- W1988819356 hasConcept C185592680 @default.
- W1988819356 hasConcept C186399102 @default.
- W1988819356 hasConcept C192562407 @default.
- W1988819356 hasConcept C204223013 @default.
- W1988819356 hasConcept C2776371256 @default.
- W1988819356 hasConcept C2777502316 @default.
- W1988819356 hasConcept C2779227376 @default.
- W1988819356 hasConcept C42360764 @default.
- W1988819356 hasConcept C43617362 @default.
- W1988819356 hasConcept C49040817 @default.
- W1988819356 hasConcept C521977710 @default.
- W1988819356 hasConcept C53524968 @default.
- W1988819356 hasConcept C78519656 @default.
- W1988819356 hasConceptScore W1988819356C106487976 @default.
- W1988819356 hasConceptScore W1988819356C11432220 @default.
- W1988819356 hasConceptScore W1988819356C127413603 @default.
- W1988819356 hasConceptScore W1988819356C131779359 @default.
- W1988819356 hasConceptScore W1988819356C171250308 @default.
- W1988819356 hasConceptScore W1988819356C178790620 @default.
- W1988819356 hasConceptScore W1988819356C185592680 @default.
- W1988819356 hasConceptScore W1988819356C186399102 @default.
- W1988819356 hasConceptScore W1988819356C192562407 @default.
- W1988819356 hasConceptScore W1988819356C204223013 @default.
- W1988819356 hasConceptScore W1988819356C2776371256 @default.
- W1988819356 hasConceptScore W1988819356C2777502316 @default.
- W1988819356 hasConceptScore W1988819356C2779227376 @default.
- W1988819356 hasConceptScore W1988819356C42360764 @default.
- W1988819356 hasConceptScore W1988819356C43617362 @default.
- W1988819356 hasConceptScore W1988819356C49040817 @default.
- W1988819356 hasConceptScore W1988819356C521977710 @default.
- W1988819356 hasConceptScore W1988819356C53524968 @default.
- W1988819356 hasConceptScore W1988819356C78519656 @default.
- W1988819356 hasLocation W19888193561 @default.
- W1988819356 hasOpenAccess W1988819356 @default.
- W1988819356 hasPrimaryLocation W19888193561 @default.
- W1988819356 hasRelatedWork W1569278359 @default.
- W1988819356 hasRelatedWork W178758932 @default.
- W1988819356 hasRelatedWork W1988819356 @default.
- W1988819356 hasRelatedWork W2018484226 @default.
- W1988819356 hasRelatedWork W2030618363 @default.
- W1988819356 hasRelatedWork W2043576736 @default.
- W1988819356 hasRelatedWork W2070549203 @default.
- W1988819356 hasRelatedWork W2092760259 @default.
- W1988819356 hasRelatedWork W2488412051 @default.
- W1988819356 hasRelatedWork W1584753432 @default.
- W1988819356 isParatext "false" @default.
- W1988819356 isRetracted "false" @default.
- W1988819356 magId "1988819356" @default.
- W1988819356 workType "article" @default.