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- W1989006593 abstract "We investigated silicon photochemical vapor deposition using a disilane, diborane, and hydrogen gas system under a deuterium and a mercury lamps. Vacuum ultraviolet light reduces seriously the boron doping. We found that this is mainly due to gas phase reaction of vacuum ultraviolet excited radicals. Ultraviolet light does not affect these gas phase reaction. It irradiates the wafer surface and make it active. The enhancement of the electric activation rate of boron in silicon layer observed under UV irradiation is due to the surface activation." @default.
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- W1989006593 date "1990-02-23" @default.
- W1989006593 modified "2023-09-23" @default.
- W1989006593 title "Wavelength Dependence Of Boron Doping In Silicon Photochemical Vapor Deposition" @default.
- W1989006593 doi "https://doi.org/10.1117/12.963983" @default.
- W1989006593 hasPublicationYear "1990" @default.
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