Matches in SemOpenAlex for { <https://semopenalex.org/work/W1989041742> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W1989041742 endingPage "892" @default.
- W1989041742 startingPage "888" @default.
- W1989041742 abstract "High efficiency for the removal of carbon coatings in narrow (1 mm) gaps and carbon films directly exposed has been found in He/O2 discharges, corresponding to >70% of the yield of directly exposed surfaces. Moreover, the absolute removal rate for the naked films was found to be 12 nm min [J.A. Ferreira, F.L. Tabarés, D. Tafalla, in: 12th ICFRM Conference, Santa Barbara, USA]. This has been associated to the different wall scenarios in the present work, leading to enhanced atomic recycling, of positive effect in the cleaning rate of the carbon films. Also, an alternative cleaning technique was studied, based on glow discharges in H2/N2. This is compared with He/O2. A high cleaning efficiency is also seen, based on the formation of high stable, N–C containing products. Finally, changes in carbon film composition by the addition of B have been identified as responsible for the much higher resistance of doped films against both types of cleaning plasmas." @default.
- W1989041742 created "2016-06-24" @default.
- W1989041742 creator A5013064068 @default.
- W1989041742 creator A5065188502 @default.
- W1989041742 creator A5086680210 @default.
- W1989041742 date "2007-06-01" @default.
- W1989041742 modified "2023-10-01" @default.
- W1989041742 title "Alternative cleaning technique for the removal of carbon deposits" @default.
- W1989041742 cites W2048225332 @default.
- W1989041742 cites W2098917946 @default.
- W1989041742 cites W2121748016 @default.
- W1989041742 cites W2512051574 @default.
- W1989041742 cites W4229946225 @default.
- W1989041742 doi "https://doi.org/10.1016/j.jnucmat.2007.01.109" @default.
- W1989041742 hasPublicationYear "2007" @default.
- W1989041742 type Work @default.
- W1989041742 sameAs 1989041742 @default.
- W1989041742 citedByCount "25" @default.
- W1989041742 countsByYear W19890417422012 @default.
- W1989041742 countsByYear W19890417422013 @default.
- W1989041742 countsByYear W19890417422014 @default.
- W1989041742 countsByYear W19890417422015 @default.
- W1989041742 countsByYear W19890417422016 @default.
- W1989041742 countsByYear W19890417422023 @default.
- W1989041742 crossrefType "journal-article" @default.
- W1989041742 hasAuthorship W1989041742A5013064068 @default.
- W1989041742 hasAuthorship W1989041742A5065188502 @default.
- W1989041742 hasAuthorship W1989041742A5086680210 @default.
- W1989041742 hasConcept C104779481 @default.
- W1989041742 hasConcept C107872376 @default.
- W1989041742 hasConcept C113196181 @default.
- W1989041742 hasConcept C121332964 @default.
- W1989041742 hasConcept C127413603 @default.
- W1989041742 hasConcept C134121241 @default.
- W1989041742 hasConcept C140205800 @default.
- W1989041742 hasConcept C159985019 @default.
- W1989041742 hasConcept C171250308 @default.
- W1989041742 hasConcept C185592680 @default.
- W1989041742 hasConcept C19067145 @default.
- W1989041742 hasConcept C192562407 @default.
- W1989041742 hasConcept C2776595061 @default.
- W1989041742 hasConcept C42360764 @default.
- W1989041742 hasConcept C62520636 @default.
- W1989041742 hasConcept C75937256 @default.
- W1989041742 hasConcept C82706917 @default.
- W1989041742 hasConceptScore W1989041742C104779481 @default.
- W1989041742 hasConceptScore W1989041742C107872376 @default.
- W1989041742 hasConceptScore W1989041742C113196181 @default.
- W1989041742 hasConceptScore W1989041742C121332964 @default.
- W1989041742 hasConceptScore W1989041742C127413603 @default.
- W1989041742 hasConceptScore W1989041742C134121241 @default.
- W1989041742 hasConceptScore W1989041742C140205800 @default.
- W1989041742 hasConceptScore W1989041742C159985019 @default.
- W1989041742 hasConceptScore W1989041742C171250308 @default.
- W1989041742 hasConceptScore W1989041742C185592680 @default.
- W1989041742 hasConceptScore W1989041742C19067145 @default.
- W1989041742 hasConceptScore W1989041742C192562407 @default.
- W1989041742 hasConceptScore W1989041742C2776595061 @default.
- W1989041742 hasConceptScore W1989041742C42360764 @default.
- W1989041742 hasConceptScore W1989041742C62520636 @default.
- W1989041742 hasConceptScore W1989041742C75937256 @default.
- W1989041742 hasConceptScore W1989041742C82706917 @default.
- W1989041742 hasLocation W19890417421 @default.
- W1989041742 hasOpenAccess W1989041742 @default.
- W1989041742 hasPrimaryLocation W19890417421 @default.
- W1989041742 hasRelatedWork W1983939272 @default.
- W1989041742 hasRelatedWork W2004496631 @default.
- W1989041742 hasRelatedWork W2047664132 @default.
- W1989041742 hasRelatedWork W2401463829 @default.
- W1989041742 hasRelatedWork W2748952813 @default.
- W1989041742 hasRelatedWork W2899084033 @default.
- W1989041742 hasRelatedWork W2949184651 @default.
- W1989041742 hasRelatedWork W2952649848 @default.
- W1989041742 hasRelatedWork W4236163253 @default.
- W1989041742 hasRelatedWork W4254820178 @default.
- W1989041742 hasVolume "363-365" @default.
- W1989041742 isParatext "false" @default.
- W1989041742 isRetracted "false" @default.
- W1989041742 magId "1989041742" @default.
- W1989041742 workType "article" @default.