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• W1989062007 abstract "This paper details a study undertaken to revisit defect specifications and maskshop metrology calibration for a mature lithographic process. A programmed array was created containing darkfield and brightfield feature types at various pitches with appropriate OPC sizing. Defects were systematically added to the layout with differing sizes and spacing from the main feature. After exposure with production illumination settings, resist image data was collected and used to determine critical defect sizes. These results are correlated with typical maskshop metrology methods such as AIMS, AVI Photomask Defect Metrology Software (PDMS), and CDSEM. In some cases, it is shown that AIMS data correlates poorly with both defect size and spacing from the feature edge when using illumination settings nominally matched to the exposure tool. Finally, for the particular processes reviewed in this study, the results indicate that the initial reticle defect specifications are often too aggressive for the finalized production lithographic process." @default.
• W1989062007 created "2016-06-24" @default.
• W1989062007 creator A5002580636 @default.
• W1989062007 creator A5005590008 @default.
• W1989062007 creator A5028993344 @default.
• W1989062007 creator A5037201913 @default.
• W1989062007 creator A5052199939 @default.
• W1989062007 creator A5052805226 @default.
• W1989062007 creator A5057243931 @default.
• W1989062007 creator A5081353247 @default.
• W1989062007 creator A5081929993 @default.
• W1989062007 date "2004-12-06" @default.
• W1989062007 modified "2023-09-25" @default.
• W1989062007 title "Closing the defect printability loop: optimizing defect specifications for an established lithographic process" @default.
• W1989062007 doi "https://doi.org/10.1117/12.569257" @default.
• W1989062007 hasPublicationYear "2004" @default.
• W1989062007 type Work @default.
• W1989062007 sameAs 1989062007 @default.
• W1989062007 citedByCount "0" @default.
• W1989062007 crossrefType "proceedings-article" @default.
• W1989062007 hasAuthorship W1989062007A5002580636 @default.
• W1989062007 hasAuthorship W1989062007A5005590008 @default.
• W1989062007 hasAuthorship W1989062007A5028993344 @default.
• W1989062007 hasAuthorship W1989062007A5037201913 @default.
• W1989062007 hasAuthorship W1989062007A5052199939 @default.
• W1989062007 hasAuthorship W1989062007A5052805226 @default.
• W1989062007 hasAuthorship W1989062007A5057243931 @default.
• W1989062007 hasAuthorship W1989062007A5081353247 @default.
• W1989062007 hasAuthorship W1989062007A5081929993 @default.
• W1989062007 hasConcept C105487726 @default.
• W1989062007 hasConcept C111919701 @default.
• W1989062007 hasConcept C120665830 @default.
• W1989062007 hasConcept C121332964 @default.
• W1989062007 hasConcept C138885662 @default.
• W1989062007 hasConcept C142362112 @default.
• W1989062007 hasConcept C146617872 @default.
• W1989062007 hasConcept C14737013 @default.
• W1989062007 hasConcept C153349607 @default.
• W1989062007 hasConcept C154945302 @default.
• W1989062007 hasConcept C160671074 @default.
• W1989062007 hasConcept C162307627 @default.
• W1989062007 hasConcept C165838908 @default.
• W1989062007 hasConcept C171250308 @default.
• W1989062007 hasConcept C192562407 @default.
• W1989062007 hasConcept C195766429 @default.
• W1989062007 hasConcept C199360897 @default.
• W1989062007 hasConcept C204223013 @default.
• W1989062007 hasConcept C207789793 @default.
• W1989062007 hasConcept C2776401178 @default.
• W1989062007 hasConcept C2777767291 @default.
• W1989062007 hasConcept C2777904410 @default.
• W1989062007 hasConcept C2779227376 @default.
• W1989062007 hasConcept C41008148 @default.
• W1989062007 hasConcept C41895202 @default.
• W1989062007 hasConcept C49040817 @default.
• W1989062007 hasConcept C53524968 @default.
• W1989062007 hasConcept C62520636 @default.
• W1989062007 hasConcept C78371743 @default.
• W1989062007 hasConcept C98045186 @default.
• W1989062007 hasConceptScore W1989062007C105487726 @default.
• W1989062007 hasConceptScore W1989062007C111919701 @default.
• W1989062007 hasConceptScore W1989062007C120665830 @default.
• W1989062007 hasConceptScore W1989062007C121332964 @default.
• W1989062007 hasConceptScore W1989062007C138885662 @default.
• W1989062007 hasConceptScore W1989062007C142362112 @default.
• W1989062007 hasConceptScore W1989062007C146617872 @default.
• W1989062007 hasConceptScore W1989062007C14737013 @default.
• W1989062007 hasConceptScore W1989062007C153349607 @default.
• W1989062007 hasConceptScore W1989062007C154945302 @default.
• W1989062007 hasConceptScore W1989062007C160671074 @default.
• W1989062007 hasConceptScore W1989062007C162307627 @default.
• W1989062007 hasConceptScore W1989062007C165838908 @default.
• W1989062007 hasConceptScore W1989062007C171250308 @default.
• W1989062007 hasConceptScore W1989062007C192562407 @default.
• W1989062007 hasConceptScore W1989062007C195766429 @default.
• W1989062007 hasConceptScore W1989062007C199360897 @default.
• W1989062007 hasConceptScore W1989062007C204223013 @default.
• W1989062007 hasConceptScore W1989062007C207789793 @default.
• W1989062007 hasConceptScore W1989062007C2776401178 @default.
• W1989062007 hasConceptScore W1989062007C2777767291 @default.
• W1989062007 hasConceptScore W1989062007C2777904410 @default.
• W1989062007 hasConceptScore W1989062007C2779227376 @default.
• W1989062007 hasConceptScore W1989062007C41008148 @default.
• W1989062007 hasConceptScore W1989062007C41895202 @default.
• W1989062007 hasConceptScore W1989062007C49040817 @default.
• W1989062007 hasConceptScore W1989062007C53524968 @default.
• W1989062007 hasConceptScore W1989062007C62520636 @default.
• W1989062007 hasConceptScore W1989062007C78371743 @default.
• W1989062007 hasConceptScore W1989062007C98045186 @default.
• W1989062007 hasLocation W19890620071 @default.
• W1989062007 hasOpenAccess W1989062007 @default.
• W1989062007 hasPrimaryLocation W19890620071 @default.
• W1989062007 hasRelatedWork W2254033172 @default.
• W1989062007 hasRelatedWork W2269482810 @default.
• W1989062007 hasRelatedWork W2369068860 @default.
• W1989062007 hasRelatedWork W2593944163 @default.
• W1989062007 hasRelatedWork W2748952813 @default.
• W1989062007 hasRelatedWork W2782893325 @default.
• W1989062007 hasRelatedWork W2899084033 @default.
• W1989062007 hasRelatedWork W2913175367 @default.

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