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• W1989098373 abstract "Laser desorption time of flight mass spectroscopy was applied to measure carbon materials with various degrees of crystallinity. The threshold laser energy density (Eth) to detect 12C+ systematically varied not only with the crystallinity of materials but also with light soaking and thermal annealing with respect to hydrogenated amorphous carbon (a-C:H). Since Eth decreased by the light irradiation could be recovered by thermal annealing as was observed for hydrogenated amorphous silicon, we have verified for the first time a photo-degradation effect in a-C:H film." @default.
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• W1989098373 date "1998-05-01" @default.
• W1989098373 modified "2023-10-18" @default.
• W1989098373 title "Properties of amorphous carbon films characterized by laser desorption time of flight mass spectroscopy" @default.
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• W1989098373 doi "https://doi.org/10.1016/s0022-3093(98)00140-9" @default.
• W1989098373 hasPublicationYear "1998" @default.
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