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• W1989118107 abstract "This study proposes a distributed input system to generate large-area uniform microwave field for the applications of plasma excitation or material processing. A microwave source is divided into four equal-amplitude and equal-phase waves through cascaded H-plane and E-plane power dividers. The wave in rectangular TE10 mode is subsequently converted into cylindrical TE11 mode and then propagates through a slightly deformed waveguide to form a circularly polarized wave. The four circularly polarized waves with a 2 × 2 input array are led into a reaction chamber to excite plasma or an applicator to process materials. An experiment was conducted, which verified the simulated results. The idea of generating uniform microwave field can be scaled to a much larger area if an n × n input array is used" @default.
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• W1989118107 date "2012-03-01" @default.
• W1989118107 modified "2023-09-27" @default.
• W1989118107 title "Generating large-area uniform microwave field for plasma excitation" @default.
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• W1989118107 doi "https://doi.org/10.1063/1.3692231" @default.
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