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- W1989155726 abstract "We investigated the thermally induced solid state interdiffusion of Au/Ge/Pd and Ge/Pd ohmic contacts on MBE grown n-GaSb. Furthermore, the electrical behavior of these contacts for different contact sizes down to 540 nm in diameter was compared. A specific contact resistivity as low as 4.9×10−6 Ω cm2 was measured for the Au/Ge/Pd metallization. After annealing, polycrystalline AuSb2 was observed by grazing incident X-ray diffraction (GIXD). Compared to Ge/Pd metallizations a gold top layer reduces the specific contact resistivity. The atomic structure or microstructure of the Au/Ge/Pd metallization showed a significant reduction of the thickness of amorphous Ge and led to a more spiky interface, which was observed by cross-sectional transmission electron microscopy (TEM). Furthermore, an epitaxial regrowth of GaSb occurs, which is estimated to lead to a n+-GaSb layer. The atomic microstructure has a significant effect on the current voltage (I–V) characteristic up to a contact size of 950 nm in diameter, which shows a wide spread from ohmic to a more Schottky like behavior." @default.
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- W1989155726 date "2001-07-01" @default.
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- W1989155726 title "Microstructure analysis of ohmic contacts on MBE grown n-GaSb and investigation of sub-micron contacts" @default.
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- W1989155726 doi "https://doi.org/10.1016/s0022-0248(01)00785-0" @default.
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