Matches in SemOpenAlex for { <https://semopenalex.org/work/W1989206562> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W1989206562 endingPage "303" @default.
- W1989206562 startingPage "301" @default.
- W1989206562 abstract "Three-dimensional woodpile photonic crystals for 1.55 μm telecommunication wavelength are fabricated in a GaAs wafer by the two-directional etching technique for the first time. Chlorine-based chemically assisted ion beam etching is used for deep anisotropic GaAs etching. High-precision woodpile photonic crystals with 150×150×2.25 unit cells are fabricated in a two-patterning process, which is applicable to the introduction of intentional photonic crystal disorders in epitaxially grown, active materials without wafer bonding process." @default.
- W1989206562 created "2016-06-24" @default.
- W1989206562 creator A5018127508 @default.
- W1989206562 creator A5033630878 @default.
- W1989206562 date "2010-03-01" @default.
- W1989206562 modified "2023-09-26" @default.
- W1989206562 title "Woodpile photonic crystal fabricated in GaAs by two-directional etching method" @default.
- W1989206562 cites W1679395621 @default.
- W1989206562 cites W1923640056 @default.
- W1989206562 cites W1969216928 @default.
- W1989206562 cites W1972187331 @default.
- W1989206562 cites W1978691316 @default.
- W1989206562 cites W1992774666 @default.
- W1989206562 cites W1992994268 @default.
- W1989206562 cites W2003452714 @default.
- W1989206562 cites W2012658143 @default.
- W1989206562 cites W2025169742 @default.
- W1989206562 cites W2037360663 @default.
- W1989206562 cites W2038400164 @default.
- W1989206562 cites W2039397003 @default.
- W1989206562 cites W2049574999 @default.
- W1989206562 cites W2075689277 @default.
- W1989206562 cites W2075739390 @default.
- W1989206562 cites W2083896620 @default.
- W1989206562 cites W2087854907 @default.
- W1989206562 cites W2116955132 @default.
- W1989206562 cites W2126418712 @default.
- W1989206562 cites W2152658800 @default.
- W1989206562 cites W2163931124 @default.
- W1989206562 doi "https://doi.org/10.1116/1.3308972" @default.
- W1989206562 hasPublicationYear "2010" @default.
- W1989206562 type Work @default.
- W1989206562 sameAs 1989206562 @default.
- W1989206562 citedByCount "18" @default.
- W1989206562 countsByYear W19892065622012 @default.
- W1989206562 countsByYear W19892065622013 @default.
- W1989206562 countsByYear W19892065622014 @default.
- W1989206562 countsByYear W19892065622017 @default.
- W1989206562 countsByYear W19892065622018 @default.
- W1989206562 countsByYear W19892065622019 @default.
- W1989206562 crossrefType "journal-article" @default.
- W1989206562 hasAuthorship W1989206562A5018127508 @default.
- W1989206562 hasAuthorship W1989206562A5033630878 @default.
- W1989206562 hasConcept C100460472 @default.
- W1989206562 hasConcept C110738630 @default.
- W1989206562 hasConcept C120665830 @default.
- W1989206562 hasConcept C121332964 @default.
- W1989206562 hasConcept C1291036 @default.
- W1989206562 hasConcept C130472188 @default.
- W1989206562 hasConcept C154843443 @default.
- W1989206562 hasConcept C159985019 @default.
- W1989206562 hasConcept C160671074 @default.
- W1989206562 hasConcept C171250308 @default.
- W1989206562 hasConcept C192562407 @default.
- W1989206562 hasConcept C20788544 @default.
- W1989206562 hasConcept C2779227376 @default.
- W1989206562 hasConcept C49040817 @default.
- W1989206562 hasConcept C75302062 @default.
- W1989206562 hasConcept C85725439 @default.
- W1989206562 hasConceptScore W1989206562C100460472 @default.
- W1989206562 hasConceptScore W1989206562C110738630 @default.
- W1989206562 hasConceptScore W1989206562C120665830 @default.
- W1989206562 hasConceptScore W1989206562C121332964 @default.
- W1989206562 hasConceptScore W1989206562C1291036 @default.
- W1989206562 hasConceptScore W1989206562C130472188 @default.
- W1989206562 hasConceptScore W1989206562C154843443 @default.
- W1989206562 hasConceptScore W1989206562C159985019 @default.
- W1989206562 hasConceptScore W1989206562C160671074 @default.
- W1989206562 hasConceptScore W1989206562C171250308 @default.
- W1989206562 hasConceptScore W1989206562C192562407 @default.
- W1989206562 hasConceptScore W1989206562C20788544 @default.
- W1989206562 hasConceptScore W1989206562C2779227376 @default.
- W1989206562 hasConceptScore W1989206562C49040817 @default.
- W1989206562 hasConceptScore W1989206562C75302062 @default.
- W1989206562 hasConceptScore W1989206562C85725439 @default.
- W1989206562 hasIssue "2" @default.
- W1989206562 hasLocation W19892065621 @default.
- W1989206562 hasOpenAccess W1989206562 @default.
- W1989206562 hasPrimaryLocation W19892065621 @default.
- W1989206562 hasRelatedWork W1926448700 @default.
- W1989206562 hasRelatedWork W1976560751 @default.
- W1989206562 hasRelatedWork W2018237554 @default.
- W1989206562 hasRelatedWork W2052457018 @default.
- W1989206562 hasRelatedWork W2065484933 @default.
- W1989206562 hasRelatedWork W2164883942 @default.
- W1989206562 hasRelatedWork W2270301116 @default.
- W1989206562 hasRelatedWork W2556589395 @default.
- W1989206562 hasRelatedWork W4321317699 @default.
- W1989206562 hasRelatedWork W2093649186 @default.
- W1989206562 hasVolume "28" @default.
- W1989206562 isParatext "false" @default.
- W1989206562 isRetracted "false" @default.
- W1989206562 magId "1989206562" @default.
- W1989206562 workType "article" @default.