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- W1989296070 abstract "In-Ga-Zn-O thin films fabricated by reactive RF magnetron sputtering have been investigated for their compositional, structural, morphological, electrical and optical properties. All resulting films present the amorphous microstructure, and root mean square roughness below 0.6 nm. The variation of the oxygen content in the deposition atmosphere from 0% to 0.9% results in the formation of a-IGZO thin films consisting of 15-29% indium, 16-28% gallium, 10-13% zinc and 30-60% oxygen, which significantly differs from the InGaZnO<sub>4</sub> target composition. IGZO thin films present the transmittance in range of 75% to 90% for VIS-NIR wavelengths. Mechanism of free electrons generation via oxygen vacancies formation is proposed to determine the relation between oxygen content in the deposition atmosphere and the transport properties of the IGZO of the thin films." @default.
- W1989296070 created "2016-06-24" @default.
- W1989296070 creator A5028567931 @default.
- W1989296070 creator A5032704215 @default.
- W1989296070 creator A5039598706 @default.
- W1989296070 creator A5048548694 @default.
- W1989296070 creator A5050381478 @default.
- W1989296070 creator A5060382630 @default.
- W1989296070 creator A5077117457 @default.
- W1989296070 creator A5091216223 @default.
- W1989296070 date "2013-07-25" @default.
- W1989296070 modified "2023-09-23" @default.
- W1989296070 title "In-Ga-Zn-O amorphous thin films for transparent electronics" @default.
- W1989296070 doi "https://doi.org/10.1117/12.2031261" @default.
- W1989296070 hasPublicationYear "2013" @default.
- W1989296070 type Work @default.
- W1989296070 sameAs 1989296070 @default.
- W1989296070 citedByCount "2" @default.
- W1989296070 countsByYear W19892960702015 @default.
- W1989296070 countsByYear W19892960702016 @default.
- W1989296070 crossrefType "proceedings-article" @default.
- W1989296070 hasAuthorship W1989296070A5028567931 @default.
- W1989296070 hasAuthorship W1989296070A5032704215 @default.
- W1989296070 hasAuthorship W1989296070A5039598706 @default.
- W1989296070 hasAuthorship W1989296070A5048548694 @default.
- W1989296070 hasAuthorship W1989296070A5050381478 @default.
- W1989296070 hasAuthorship W1989296070A5060382630 @default.
- W1989296070 hasAuthorship W1989296070A5077117457 @default.
- W1989296070 hasAuthorship W1989296070A5091216223 @default.
- W1989296070 hasConcept C113196181 @default.
- W1989296070 hasConcept C150493377 @default.
- W1989296070 hasConcept C151730666 @default.
- W1989296070 hasConcept C171250308 @default.
- W1989296070 hasConcept C178790620 @default.
- W1989296070 hasConcept C185592680 @default.
- W1989296070 hasConcept C19067145 @default.
- W1989296070 hasConcept C191897082 @default.
- W1989296070 hasConcept C192562407 @default.
- W1989296070 hasConcept C22423302 @default.
- W1989296070 hasConcept C2816523 @default.
- W1989296070 hasConcept C43617362 @default.
- W1989296070 hasConcept C49040817 @default.
- W1989296070 hasConcept C535196362 @default.
- W1989296070 hasConcept C540031477 @default.
- W1989296070 hasConcept C550372918 @default.
- W1989296070 hasConcept C56052488 @default.
- W1989296070 hasConcept C61427134 @default.
- W1989296070 hasConcept C64297162 @default.
- W1989296070 hasConcept C8010536 @default.
- W1989296070 hasConcept C86803240 @default.
- W1989296070 hasConcept C87976508 @default.
- W1989296070 hasConceptScore W1989296070C113196181 @default.
- W1989296070 hasConceptScore W1989296070C150493377 @default.
- W1989296070 hasConceptScore W1989296070C151730666 @default.
- W1989296070 hasConceptScore W1989296070C171250308 @default.
- W1989296070 hasConceptScore W1989296070C178790620 @default.
- W1989296070 hasConceptScore W1989296070C185592680 @default.
- W1989296070 hasConceptScore W1989296070C19067145 @default.
- W1989296070 hasConceptScore W1989296070C191897082 @default.
- W1989296070 hasConceptScore W1989296070C192562407 @default.
- W1989296070 hasConceptScore W1989296070C22423302 @default.
- W1989296070 hasConceptScore W1989296070C2816523 @default.
- W1989296070 hasConceptScore W1989296070C43617362 @default.
- W1989296070 hasConceptScore W1989296070C49040817 @default.
- W1989296070 hasConceptScore W1989296070C535196362 @default.
- W1989296070 hasConceptScore W1989296070C540031477 @default.
- W1989296070 hasConceptScore W1989296070C550372918 @default.
- W1989296070 hasConceptScore W1989296070C56052488 @default.
- W1989296070 hasConceptScore W1989296070C61427134 @default.
- W1989296070 hasConceptScore W1989296070C64297162 @default.
- W1989296070 hasConceptScore W1989296070C8010536 @default.
- W1989296070 hasConceptScore W1989296070C86803240 @default.
- W1989296070 hasConceptScore W1989296070C87976508 @default.
- W1989296070 hasLocation W19892960701 @default.
- W1989296070 hasOpenAccess W1989296070 @default.
- W1989296070 hasPrimaryLocation W19892960701 @default.
- W1989296070 hasRelatedWork W1562941104 @default.
- W1989296070 hasRelatedWork W1671997990 @default.
- W1989296070 hasRelatedWork W1967685249 @default.
- W1989296070 hasRelatedWork W1969920584 @default.
- W1989296070 hasRelatedWork W2077118741 @default.
- W1989296070 hasRelatedWork W2316948141 @default.
- W1989296070 hasRelatedWork W2357654931 @default.
- W1989296070 hasRelatedWork W2571385234 @default.
- W1989296070 hasRelatedWork W2728879421 @default.
- W1989296070 hasRelatedWork W40447320 @default.
- W1989296070 isParatext "false" @default.
- W1989296070 isRetracted "false" @default.
- W1989296070 magId "1989296070" @default.
- W1989296070 workType "article" @default.