Matches in SemOpenAlex for { <https://semopenalex.org/work/W1989338368> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W1989338368 endingPage "294" @default.
- W1989338368 startingPage "291" @default.
- W1989338368 abstract "As an alternative for producing the meter-size diffraction grating demanded in many technical field, grating mosaic requires positional detection with accuracy of sub-microns. In this paper, we propose a positional detection method based on image processing of three far-field diffraction intensity patterns in two wavelengths. With a set of detailed adjustment steps deduced from theoretical analysis, we successfully detected and separated the two positional errors. Moreover, with the three patterns we enlarged the target range of coarse adjustment required for further fine adjustment in longitudinal position. We achieved positional detection sensitivity of less than 14 nm, and diagnosed the alignment with the far-field pattern in a third wavelength." @default.
- W1989338368 created "2016-06-24" @default.
- W1989338368 creator A5012674271 @default.
- W1989338368 creator A5032752009 @default.
- W1989338368 date "2008-06-01" @default.
- W1989338368 modified "2023-09-24" @default.
- W1989338368 title "Positional Detection in Grating Mosaic Based on Image Processing of Far-Field Diffraction Intensity Patterns in Two Wavelengths" @default.
- W1989338368 cites W1482023238 @default.
- W1989338368 cites W1965748889 @default.
- W1989338368 cites W1992873349 @default.
- W1989338368 cites W1993689085 @default.
- W1989338368 cites W2051259406 @default.
- W1989338368 cites W2064567385 @default.
- W1989338368 cites W2111987648 @default.
- W1989338368 cites W2029311040 @default.
- W1989338368 doi "https://doi.org/10.4028/www.scientific.net/kem.381-382.291" @default.
- W1989338368 hasPublicationYear "2008" @default.
- W1989338368 type Work @default.
- W1989338368 sameAs 1989338368 @default.
- W1989338368 citedByCount "0" @default.
- W1989338368 crossrefType "journal-article" @default.
- W1989338368 hasAuthorship W1989338368A5012674271 @default.
- W1989338368 hasAuthorship W1989338368A5032752009 @default.
- W1989338368 hasConcept C10138342 @default.
- W1989338368 hasConcept C120665830 @default.
- W1989338368 hasConcept C121332964 @default.
- W1989338368 hasConcept C126753812 @default.
- W1989338368 hasConcept C162324750 @default.
- W1989338368 hasConcept C192562407 @default.
- W1989338368 hasConcept C198082294 @default.
- W1989338368 hasConcept C207114421 @default.
- W1989338368 hasConcept C25227671 @default.
- W1989338368 hasConcept C2777813233 @default.
- W1989338368 hasConcept C6260449 @default.
- W1989338368 hasConcept C93038891 @default.
- W1989338368 hasConceptScore W1989338368C10138342 @default.
- W1989338368 hasConceptScore W1989338368C120665830 @default.
- W1989338368 hasConceptScore W1989338368C121332964 @default.
- W1989338368 hasConceptScore W1989338368C126753812 @default.
- W1989338368 hasConceptScore W1989338368C162324750 @default.
- W1989338368 hasConceptScore W1989338368C192562407 @default.
- W1989338368 hasConceptScore W1989338368C198082294 @default.
- W1989338368 hasConceptScore W1989338368C207114421 @default.
- W1989338368 hasConceptScore W1989338368C25227671 @default.
- W1989338368 hasConceptScore W1989338368C2777813233 @default.
- W1989338368 hasConceptScore W1989338368C6260449 @default.
- W1989338368 hasConceptScore W1989338368C93038891 @default.
- W1989338368 hasLocation W19893383681 @default.
- W1989338368 hasOpenAccess W1989338368 @default.
- W1989338368 hasPrimaryLocation W19893383681 @default.
- W1989338368 hasRelatedWork W2011160303 @default.
- W1989338368 hasRelatedWork W2020271313 @default.
- W1989338368 hasRelatedWork W2022124899 @default.
- W1989338368 hasRelatedWork W2030762106 @default.
- W1989338368 hasRelatedWork W2054640396 @default.
- W1989338368 hasRelatedWork W2074441234 @default.
- W1989338368 hasRelatedWork W2088561781 @default.
- W1989338368 hasRelatedWork W2381330663 @default.
- W1989338368 hasRelatedWork W2791127524 @default.
- W1989338368 hasRelatedWork W3216542330 @default.
- W1989338368 hasVolume "381-382" @default.
- W1989338368 isParatext "false" @default.
- W1989338368 isRetracted "false" @default.
- W1989338368 magId "1989338368" @default.
- W1989338368 workType "article" @default.