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• W1989354848 endingPage "81" @default.
• W1989354848 startingPage "76" @default.
• W1989354848 abstract "In this paper, the atomic force microscope (AFM) is used as a powerful technique for the machining and imaging of a nonconducting, thick, photoresist. A systematic approach is adopted to determine the minimum number of passes of the AFM probe tip and the optimized maximum force that could be applied by a Si cantilever on a photoresist to achieve the desired modifications. Linear relationships are established for the number of passes to achieve the corresponding attainable depth. V-grooves are fabricated in the photoresist using high normal forces of 5 and with a transverse speed of . With a higher manoeuvring speed of , a window is created in the photoresist without significant irregular undulation at its base. A regular window of with depth 60 nm and a line window of width and depth 12 nm are successfully fabricated in silicon using the photoresist machined pattern as a mask for wet preferential Si etching." @default.
• W1989354848 created "2016-06-24" @default.
• W1989354848 creator A5001973987 @default.
• W1989354848 creator A5019722690 @default.
• W1989354848 creator A5027877032 @default.
• W1989354848 creator A5033376555 @default.
• W1989354848 creator A5046395267 @default.
• W1989354848 creator A5081366427 @default.
• W1989354848 creator A5085207190 @default.
• W1989354848 date "1997-06-01" @default.
• W1989354848 modified "2023-09-27" @default.
• W1989354848 title "Submicrometer lithography of a silicon substrate by machining of photoresist using atomic force microscopy followed by wet chemical etching" @default.
• W1989354848 cites W1965079351 @default.
• W1989354848 cites W1970588492 @default.
• W1989354848 cites W1981970177 @default.
• W1989354848 cites W1982879112 @default.
• W1989354848 cites W1996816963 @default.
• W1989354848 cites W2022270174 @default.
• W1989354848 cites W2025182209 @default.
• W1989354848 cites W2037235596 @default.
• W1989354848 cites W2042195344 @default.
• W1989354848 cites W2057005543 @default.
• W1989354848 cites W2058846571 @default.
• W1989354848 cites W2058988823 @default.
• W1989354848 cites W2072707402 @default.
• W1989354848 cites W2079585449 @default.
• W1989354848 cites W2079797313 @default.
• W1989354848 cites W2084661645 @default.
• W1989354848 cites W2092346700 @default.
• W1989354848 cites W2094869387 @default.
• W1989354848 cites W2110167104 @default.
• W1989354848 cites W2162957145 @default.
• W1989354848 cites W3150248096 @default.
• W1989354848 doi "https://doi.org/10.1088/0957-4484/8/2/005" @default.
• W1989354848 hasPublicationYear "1997" @default.
• W1989354848 type Work @default.
• W1989354848 sameAs 1989354848 @default.
• W1989354848 citedByCount "14" @default.
• W1989354848 countsByYear W19893548482014 @default.
• W1989354848 countsByYear W19893548482017 @default.
• W1989354848 crossrefType "journal-article" @default.
• W1989354848 hasAuthorship W1989354848A5001973987 @default.
• W1989354848 hasAuthorship W1989354848A5019722690 @default.
• W1989354848 hasAuthorship W1989354848A5027877032 @default.
• W1989354848 hasAuthorship W1989354848A5033376555 @default.
• W1989354848 hasAuthorship W1989354848A5046395267 @default.
• W1989354848 hasAuthorship W1989354848A5081366427 @default.
• W1989354848 hasAuthorship W1989354848A5085207190 @default.
• W1989354848 hasConcept C100460472 @default.
• W1989354848 hasConcept C102951782 @default.
• W1989354848 hasConcept C105487726 @default.
• W1989354848 hasConcept C111368507 @default.
• W1989354848 hasConcept C120665830 @default.
• W1989354848 hasConcept C121332964 @default.
• W1989354848 hasConcept C127313418 @default.
• W1989354848 hasConcept C134406635 @default.
• W1989354848 hasConcept C141354745 @default.
• W1989354848 hasConcept C159985019 @default.
• W1989354848 hasConcept C171250308 @default.
• W1989354848 hasConcept C191897082 @default.
• W1989354848 hasConcept C192562407 @default.
• W1989354848 hasConcept C204223013 @default.
• W1989354848 hasConcept C2777289219 @default.
• W1989354848 hasConcept C2777441419 @default.
• W1989354848 hasConcept C2779227376 @default.
• W1989354848 hasConcept C33220542 @default.
• W1989354848 hasConcept C49040817 @default.
• W1989354848 hasConcept C523214423 @default.
• W1989354848 hasConcept C53524968 @default.
• W1989354848 hasConcept C544956773 @default.
• W1989354848 hasConceptScore W1989354848C100460472 @default.
• W1989354848 hasConceptScore W1989354848C102951782 @default.
• W1989354848 hasConceptScore W1989354848C105487726 @default.
• W1989354848 hasConceptScore W1989354848C111368507 @default.
• W1989354848 hasConceptScore W1989354848C120665830 @default.
• W1989354848 hasConceptScore W1989354848C121332964 @default.
• W1989354848 hasConceptScore W1989354848C127313418 @default.
• W1989354848 hasConceptScore W1989354848C134406635 @default.
• W1989354848 hasConceptScore W1989354848C141354745 @default.
• W1989354848 hasConceptScore W1989354848C159985019 @default.
• W1989354848 hasConceptScore W1989354848C171250308 @default.
• W1989354848 hasConceptScore W1989354848C191897082 @default.
• W1989354848 hasConceptScore W1989354848C192562407 @default.
• W1989354848 hasConceptScore W1989354848C204223013 @default.
• W1989354848 hasConceptScore W1989354848C2777289219 @default.
• W1989354848 hasConceptScore W1989354848C2777441419 @default.
• W1989354848 hasConceptScore W1989354848C2779227376 @default.
• W1989354848 hasConceptScore W1989354848C33220542 @default.
• W1989354848 hasConceptScore W1989354848C49040817 @default.
• W1989354848 hasConceptScore W1989354848C523214423 @default.
• W1989354848 hasConceptScore W1989354848C53524968 @default.
• W1989354848 hasConceptScore W1989354848C544956773 @default.
• W1989354848 hasIssue "2" @default.
• W1989354848 hasLocation W19893548481 @default.
• W1989354848 hasOpenAccess W1989354848 @default.
• W1989354848 hasPrimaryLocation W19893548481 @default.
• W1989354848 hasRelatedWork W1979614610 @default.
• W1989354848 hasRelatedWork W1989722283 @default.

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