Matches in SemOpenAlex for { <https://semopenalex.org/work/W1989357748> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1989357748 endingPage "1673" @default.
- W1989357748 startingPage "1667" @default.
- W1989357748 abstract "The self-aligned titanium silicide device technology has been studied by using NH3 plasma assisted thermal annealing and ion implant through titanium metal or silicide film. Enhanced surface nitridation of titanium by activated species suppresses lateral silicide growth and oxide contamination. NH3 plasma assisted annealing can be used as an effective method to form TiSi2 and activate implanted dopant. P+N junction and P channel metal–oxide–semiconductor field-effect transistor can be produced by boron implant through Ti metal or its silicide and the NH3 plasma assisted thermal annealing." @default.
- W1989357748 created "2016-06-24" @default.
- W1989357748 creator A5044004246 @default.
- W1989357748 creator A5063696629 @default.
- W1989357748 creator A5069434639 @default.
- W1989357748 creator A5080622963 @default.
- W1989357748 date "1987-11-01" @default.
- W1989357748 modified "2023-09-23" @default.
- W1989357748 title "Self-aligned titanium silicide device technology by NH3 plasma assisted thermal annealing" @default.
- W1989357748 doi "https://doi.org/10.1116/1.583647" @default.
- W1989357748 hasPublicationYear "1987" @default.
- W1989357748 type Work @default.
- W1989357748 sameAs 1989357748 @default.
- W1989357748 citedByCount "7" @default.
- W1989357748 crossrefType "journal-article" @default.
- W1989357748 hasAuthorship W1989357748A5044004246 @default.
- W1989357748 hasAuthorship W1989357748A5063696629 @default.
- W1989357748 hasAuthorship W1989357748A5069434639 @default.
- W1989357748 hasAuthorship W1989357748A5080622963 @default.
- W1989357748 hasConcept C121332964 @default.
- W1989357748 hasConcept C145148216 @default.
- W1989357748 hasConcept C178790620 @default.
- W1989357748 hasConcept C185592680 @default.
- W1989357748 hasConcept C191897082 @default.
- W1989357748 hasConcept C191952053 @default.
- W1989357748 hasConcept C192562407 @default.
- W1989357748 hasConcept C2777855556 @default.
- W1989357748 hasConcept C2778702798 @default.
- W1989357748 hasConcept C2779851234 @default.
- W1989357748 hasConcept C2780901251 @default.
- W1989357748 hasConcept C41823505 @default.
- W1989357748 hasConcept C49040817 @default.
- W1989357748 hasConcept C501308230 @default.
- W1989357748 hasConcept C506065880 @default.
- W1989357748 hasConcept C544956773 @default.
- W1989357748 hasConcept C57863236 @default.
- W1989357748 hasConcept C62520636 @default.
- W1989357748 hasConcept C82706917 @default.
- W1989357748 hasConceptScore W1989357748C121332964 @default.
- W1989357748 hasConceptScore W1989357748C145148216 @default.
- W1989357748 hasConceptScore W1989357748C178790620 @default.
- W1989357748 hasConceptScore W1989357748C185592680 @default.
- W1989357748 hasConceptScore W1989357748C191897082 @default.
- W1989357748 hasConceptScore W1989357748C191952053 @default.
- W1989357748 hasConceptScore W1989357748C192562407 @default.
- W1989357748 hasConceptScore W1989357748C2777855556 @default.
- W1989357748 hasConceptScore W1989357748C2778702798 @default.
- W1989357748 hasConceptScore W1989357748C2779851234 @default.
- W1989357748 hasConceptScore W1989357748C2780901251 @default.
- W1989357748 hasConceptScore W1989357748C41823505 @default.
- W1989357748 hasConceptScore W1989357748C49040817 @default.
- W1989357748 hasConceptScore W1989357748C501308230 @default.
- W1989357748 hasConceptScore W1989357748C506065880 @default.
- W1989357748 hasConceptScore W1989357748C544956773 @default.
- W1989357748 hasConceptScore W1989357748C57863236 @default.
- W1989357748 hasConceptScore W1989357748C62520636 @default.
- W1989357748 hasConceptScore W1989357748C82706917 @default.
- W1989357748 hasIssue "6" @default.
- W1989357748 hasLocation W19893577481 @default.
- W1989357748 hasOpenAccess W1989357748 @default.
- W1989357748 hasPrimaryLocation W19893577481 @default.
- W1989357748 hasRelatedWork W1536164958 @default.
- W1989357748 hasRelatedWork W1997428111 @default.
- W1989357748 hasRelatedWork W2033182268 @default.
- W1989357748 hasRelatedWork W2048269824 @default.
- W1989357748 hasRelatedWork W2052759331 @default.
- W1989357748 hasRelatedWork W2065258228 @default.
- W1989357748 hasRelatedWork W2065669148 @default.
- W1989357748 hasRelatedWork W2074173678 @default.
- W1989357748 hasRelatedWork W2275386326 @default.
- W1989357748 hasRelatedWork W2546785496 @default.
- W1989357748 hasVolume "5" @default.
- W1989357748 isParatext "false" @default.
- W1989357748 isRetracted "false" @default.
- W1989357748 magId "1989357748" @default.
- W1989357748 workType "article" @default.