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• W1989463739 abstract "Higher-κ dielectric LaLuO 3 , deposited by MBD, with TiN as gate stack was integrated into SiGe p-MOSFETs. The transistors showed good characteristics. An interfacial layer between LaLuO 3 and TiN was found, resulting in a smaller-than-normal CET. MBD deposition leads to unconformity on sidewall of the transistor, inducing a gate leakage path." @default.
• W1989463739 created "2016-06-24" @default.
• W1989463739 creator A5019891361 @default.
• W1989463739 creator A5023796900 @default.
• W1989463739 creator A5027148341 @default.
• W1989463739 creator A5037261108 @default.
• W1989463739 creator A5049832461 @default.
• W1989463739 creator A5052080961 @default.
• W1989463739 creator A5054515430 @default.
• W1989463739 creator A5086898679 @default.
• W1989463739 date "2012-10-01" @default.
• W1989463739 modified "2023-09-26" @default.
• W1989463739 title "Characteristics of higher-&#x03BA; dielectric LaLuO<inf>3</inf> with TiN as gate stack" @default.
• W1989463739 cites W1994350206 @default.
• W1989463739 cites W2000904597 @default.
• W1989463739 cites W2003645630 @default.
• W1989463739 cites W2036739881 @default.
• W1989463739 cites W2090143854 @default.
• W1989463739 cites W2100392624 @default.
• W1989463739 cites W2145076696 @default.
• W1989463739 cites W2169409420 @default.
• W1989463739 cites W2312980934 @default.
• W1989463739 doi "https://doi.org/10.1109/icsict.2012.6467641" @default.
• W1989463739 hasPublicationYear "2012" @default.
• W1989463739 type Work @default.
• W1989463739 sameAs 1989463739 @default.
• W1989463739 citedByCount "0" @default.
• W1989463739 crossrefType "proceedings-article" @default.
• W1989463739 hasAuthorship W1989463739A5019891361 @default.
• W1989463739 hasAuthorship W1989463739A5023796900 @default.
• W1989463739 hasAuthorship W1989463739A5027148341 @default.
• W1989463739 hasAuthorship W1989463739A5037261108 @default.
• W1989463739 hasAuthorship W1989463739A5049832461 @default.
• W1989463739 hasAuthorship W1989463739A5052080961 @default.
• W1989463739 hasAuthorship W1989463739A5054515430 @default.
• W1989463739 hasAuthorship W1989463739A5086898679 @default.
• W1989463739 hasConcept C119599485 @default.
• W1989463739 hasConcept C127413603 @default.
• W1989463739 hasConcept C131017901 @default.
• W1989463739 hasConcept C133386390 @default.
• W1989463739 hasConcept C139719470 @default.
• W1989463739 hasConcept C151730666 @default.
• W1989463739 hasConcept C162324750 @default.
• W1989463739 hasConcept C16317505 @default.
• W1989463739 hasConcept C165801399 @default.
• W1989463739 hasConcept C166972891 @default.
• W1989463739 hasConcept C171250308 @default.
• W1989463739 hasConcept C172385210 @default.
• W1989463739 hasConcept C191897082 @default.
• W1989463739 hasConcept C192562407 @default.
• W1989463739 hasConcept C199360897 @default.
• W1989463739 hasConcept C2361726 @default.
• W1989463739 hasConcept C24326235 @default.
• W1989463739 hasConcept C2777042071 @default.
• W1989463739 hasConcept C2778413303 @default.
• W1989463739 hasConcept C2779227376 @default.
• W1989463739 hasConcept C2816523 @default.
• W1989463739 hasConcept C41008148 @default.
• W1989463739 hasConcept C49040817 @default.
• W1989463739 hasConcept C51140833 @default.
• W1989463739 hasConcept C525849907 @default.
• W1989463739 hasConcept C64297162 @default.
• W1989463739 hasConcept C86803240 @default.
• W1989463739 hasConcept C9395851 @default.
• W1989463739 hasConceptScore W1989463739C119599485 @default.
• W1989463739 hasConceptScore W1989463739C127413603 @default.
• W1989463739 hasConceptScore W1989463739C131017901 @default.
• W1989463739 hasConceptScore W1989463739C133386390 @default.
• W1989463739 hasConceptScore W1989463739C139719470 @default.
• W1989463739 hasConceptScore W1989463739C151730666 @default.
• W1989463739 hasConceptScore W1989463739C162324750 @default.
• W1989463739 hasConceptScore W1989463739C16317505 @default.
• W1989463739 hasConceptScore W1989463739C165801399 @default.
• W1989463739 hasConceptScore W1989463739C166972891 @default.
• W1989463739 hasConceptScore W1989463739C171250308 @default.
• W1989463739 hasConceptScore W1989463739C172385210 @default.
• W1989463739 hasConceptScore W1989463739C191897082 @default.
• W1989463739 hasConceptScore W1989463739C192562407 @default.
• W1989463739 hasConceptScore W1989463739C199360897 @default.
• W1989463739 hasConceptScore W1989463739C2361726 @default.
• W1989463739 hasConceptScore W1989463739C24326235 @default.
• W1989463739 hasConceptScore W1989463739C2777042071 @default.
• W1989463739 hasConceptScore W1989463739C2778413303 @default.
• W1989463739 hasConceptScore W1989463739C2779227376 @default.
• W1989463739 hasConceptScore W1989463739C2816523 @default.
• W1989463739 hasConceptScore W1989463739C41008148 @default.
• W1989463739 hasConceptScore W1989463739C49040817 @default.
• W1989463739 hasConceptScore W1989463739C51140833 @default.
• W1989463739 hasConceptScore W1989463739C525849907 @default.
• W1989463739 hasConceptScore W1989463739C64297162 @default.
• W1989463739 hasConceptScore W1989463739C86803240 @default.
• W1989463739 hasConceptScore W1989463739C9395851 @default.
• W1989463739 hasLocation W19894637391 @default.
• W1989463739 hasOpenAccess W1989463739 @default.
• W1989463739 hasPrimaryLocation W19894637391 @default.
• W1989463739 hasRelatedWork W1493387591 @default.
• W1989463739 hasRelatedWork W1563368451 @default.
• W1989463739 hasRelatedWork W1982094068 @default.
• W1989463739 hasRelatedWork W1990458040 @default.
• W1989463739 hasRelatedWork W2014363101 @default.

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