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- W1989469396 abstract "We report that one-dimensional (1D) and two-dimensional (2D) metal thin film gratings can be directly fabricated by interfering Nd–YAG pulsed laser beams (wavelength = 1064 nm, pulse width = 6 ns) incident from the backside of glass substrate. This process utilizes a laser-induced thermo-elastic force which plays a role to detach the film from the substrate. Micro-scale Au transmission gratings with a minimum feature size of 1 μm could be generated by interference-driven periodic detachment. The fabrication of tube-structured patterns as well as stripes was also possible by adjusting the pulse power and this is explained with the effect of film cohesion." @default.
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- W1989469396 date "2010-02-01" @default.
- W1989469396 modified "2023-09-25" @default.
- W1989469396 title "Fabrication of Au thin film gratings by pulsed laser interference" @default.
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- W1989469396 doi "https://doi.org/10.1016/j.apsusc.2009.11.055" @default.
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