FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1989612832> ?p ?o ?g. }

• W1989612832 endingPage "164" @default.
• W1989612832 startingPage "162" @default.
• W1989612832 abstract "Poly(methyl methacrylate) is a common polymer used as a lithographic resist for all forms of particle (photon, ion and electron) beam writing. Faithful lithographic reproduction requires that the exposure dose, Θ , lies in the window Θ 0 ⩽ Θ < Θ × 0 , where Θ 0 and Θ × 0 represent the clearing and cross-linking onset doses, respectively. In this work we have used the programmable proximity aperture ion beam lithography systems in Chiang Mai and Jyväskylä to determine the exposure characteristics in terms of fluence for 2 MeV protons, 3 MeV 4 He 2 + and 6 MeV 12 C 3 + ions, respectively. After exposure the samples were developed in 7:3 by volume propan-2-ol:de-ionised water mixture. At low fluences, where the fluence is below the clearing fluence, the exposed regions were characterised by rough regions, particularly for He with holes around the ion tracks. As the fluence (dose) increases so that the dose exceeds the clearing dose, the PMMA is uniformly removed with sharp vertical walls. When Θ exceeds the cross-linking onset fluence, the bottom of the exposed regions show undissolved PMMA." @default.
• W1989612832 created "2016-06-24" @default.
• W1989612832 creator A5011975781 @default.
• W1989612832 creator A5023230415 @default.
• W1989612832 creator A5028770105 @default.
• W1989612832 creator A5047608719 @default.
• W1989612832 creator A5067395791 @default.
• W1989612832 creator A5077104831 @default.
• W1989612832 date "2012-02-01" @default.
• W1989612832 modified "2023-10-05" @default.
• W1989612832 title "Lithography exposure characteristics of poly(methyl methacrylate) (PMMA) for carbon, helium and hydrogen ions" @default.
• W1989612832 cites W1978157807 @default.
• W1989612832 cites W1983900698 @default.
• W1989612832 cites W1989741899 @default.
• W1989612832 cites W2012202734 @default.
• W1989612832 cites W2014847072 @default.
• W1989612832 cites W2017779712 @default.
• W1989612832 cites W2043812362 @default.
• W1989612832 cites W2076601717 @default.
• W1989612832 cites W2087310901 @default.
• W1989612832 cites W2089097379 @default.
• W1989612832 cites W2108845680 @default.
• W1989612832 cites W2127863255 @default.
• W1989612832 doi "https://doi.org/10.1016/j.nimb.2011.01.056" @default.
• W1989612832 hasPublicationYear "2012" @default.
• W1989612832 type Work @default.
• W1989612832 sameAs 1989612832 @default.
• W1989612832 citedByCount "17" @default.
• W1989612832 countsByYear W19896128322012 @default.
• W1989612832 countsByYear W19896128322013 @default.
• W1989612832 countsByYear W19896128322014 @default.
• W1989612832 countsByYear W19896128322015 @default.
• W1989612832 countsByYear W19896128322016 @default.
• W1989612832 countsByYear W19896128322017 @default.
• W1989612832 countsByYear W19896128322019 @default.
• W1989612832 countsByYear W19896128322020 @default.
• W1989612832 countsByYear W19896128322021 @default.
• W1989612832 countsByYear W19896128322023 @default.
• W1989612832 crossrefType "journal-article" @default.
• W1989612832 hasAuthorship W1989612832A5011975781 @default.
• W1989612832 hasAuthorship W1989612832A5023230415 @default.
• W1989612832 hasAuthorship W1989612832A5028770105 @default.
• W1989612832 hasAuthorship W1989612832A5047608719 @default.
• W1989612832 hasAuthorship W1989612832A5067395791 @default.
• W1989612832 hasAuthorship W1989612832A5077104831 @default.
• W1989612832 hasConcept C113196181 @default.
• W1989612832 hasConcept C120665830 @default.
• W1989612832 hasConcept C121332964 @default.
• W1989612832 hasConcept C145148216 @default.
• W1989612832 hasConcept C159985019 @default.
• W1989612832 hasConcept C171250308 @default.
• W1989612832 hasConcept C178790620 @default.
• W1989612832 hasConcept C184779094 @default.
• W1989612832 hasConcept C185592680 @default.
• W1989612832 hasConcept C192562407 @default.
• W1989612832 hasConcept C200274948 @default.
• W1989612832 hasConcept C204223013 @default.
• W1989612832 hasConcept C22078206 @default.
• W1989612832 hasConcept C2777935641 @default.
• W1989612832 hasConcept C2779227376 @default.
• W1989612832 hasConcept C43617362 @default.
• W1989612832 hasConcept C44228677 @default.
• W1989612832 hasConcept C49040817 @default.
• W1989612832 hasConcept C512968161 @default.
• W1989612832 hasConcept C521977710 @default.
• W1989612832 hasConcept C53524968 @default.
• W1989612832 hasConcept C546029482 @default.
• W1989612832 hasConceptScore W1989612832C113196181 @default.
• W1989612832 hasConceptScore W1989612832C120665830 @default.
• W1989612832 hasConceptScore W1989612832C121332964 @default.
• W1989612832 hasConceptScore W1989612832C145148216 @default.
• W1989612832 hasConceptScore W1989612832C159985019 @default.
• W1989612832 hasConceptScore W1989612832C171250308 @default.
• W1989612832 hasConceptScore W1989612832C178790620 @default.
• W1989612832 hasConceptScore W1989612832C184779094 @default.
• W1989612832 hasConceptScore W1989612832C185592680 @default.
• W1989612832 hasConceptScore W1989612832C192562407 @default.
• W1989612832 hasConceptScore W1989612832C200274948 @default.
• W1989612832 hasConceptScore W1989612832C204223013 @default.
• W1989612832 hasConceptScore W1989612832C22078206 @default.
• W1989612832 hasConceptScore W1989612832C2777935641 @default.
• W1989612832 hasConceptScore W1989612832C2779227376 @default.
• W1989612832 hasConceptScore W1989612832C43617362 @default.
• W1989612832 hasConceptScore W1989612832C44228677 @default.
• W1989612832 hasConceptScore W1989612832C49040817 @default.
• W1989612832 hasConceptScore W1989612832C512968161 @default.
• W1989612832 hasConceptScore W1989612832C521977710 @default.
• W1989612832 hasConceptScore W1989612832C53524968 @default.
• W1989612832 hasConceptScore W1989612832C546029482 @default.
• W1989612832 hasLocation W19896128321 @default.
• W1989612832 hasOpenAccess W1989612832 @default.
• W1989612832 hasPrimaryLocation W19896128321 @default.
• W1989612832 hasRelatedWork W1968222564 @default.
• W1989612832 hasRelatedWork W1978143552 @default.
• W1989612832 hasRelatedWork W1990909305 @default.
• W1989612832 hasRelatedWork W1994754116 @default.
• W1989612832 hasRelatedWork W2045370251 @default.
• W1989612832 hasRelatedWork W2052439749 @default.

• next