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• W1989690411 endingPage "338" @default.
• W1989690411 startingPage "332" @default.
• W1989690411 abstract "The structural evolution of tantalum nitride (TaN) films deposited by reactive rf magnetron sputtering were investigated in detail by using transmission electron microscopy (TEM) and x-ray diffractometry (XRD) for a wide range of thickness from 2 nm to 2 μm under various N2/Ar flow ratios from 0 to 20 vol % on both amorphous SiO2 (a-SiO2) and randomly oriented polycrystalline fcc TaN (poly-fcc-TaN) substrates. Although the films had various crystalline structures [including tetragonal Ta, bcc Ta(N), and fcc TaN] of different preferred orientation (PO) and had amorphous phases depending on deposition conditions, the formation mechanism of these structures was systematically explained by mapping them on 2D graphs of film thickness vs N2/Ar flow ratio. The texture map of films deposited on a-SiO2 substrates reflected both nucleation and growth stages, whereas that of films deposited on poly-fcc-TaN substrates reflected mainly the growth stage. Comparison of these two maps allowed the nucleation and growth processes to be separately discussed. For films deposited at 4 vol % N2/Ar ratio on a-SiO2 substrates, an amorphous phase initially appeared when the film thickness was 1.8–3.5 nm. When the film thickness was about 7 nm, nucleation occurred to form fcc TaN without any PO. When the thickness was about 100 nm, (111) PO appeared. Finally, when the thickness exceeded 200 nm, (200) PO dominated the film. Cross-sectional TEM micrographs revealed that evolutionary selection growth occurred when the film was 200-nm-thick to cause the PO change. (111) PO was preferred at relatively low (2–3 vol %) and high (⩾10 vol %) N2/Ar ratios, whereas (200) was preferred at medium N2/Ar ratio (4–7 vol %)." @default.
• W1989690411 created "2016-06-24" @default.
• W1989690411 creator A5004999029 @default.
• W1989690411 creator A5005386555 @default.
• W1989690411 creator A5020879259 @default.
• W1989690411 creator A5034051021 @default.
• W1989690411 creator A5053588158 @default.
• W1989690411 creator A5070926691 @default.
• W1989690411 date "2004-02-12" @default.
• W1989690411 modified "2023-10-01" @default.
• W1989690411 title "Preferred orientation and film structure of TaN films deposited by reactive magnetron sputtering" @default.
• W1989690411 cites W1966291779 @default.
• W1989690411 cites W1973833155 @default.
• W1989690411 cites W1973913422 @default.
• W1989690411 cites W1979379033 @default.
• W1989690411 cites W1990865867 @default.
• W1989690411 cites W1999703222 @default.
• W1989690411 cites W2008590968 @default.
• W1989690411 cites W2014649041 @default.
• W1989690411 cites W2020297538 @default.
• W1989690411 cites W2030444818 @default.
• W1989690411 cites W2042183174 @default.
• W1989690411 cites W2043762612 @default.
• W1989690411 cites W2044478176 @default.
• W1989690411 cites W2061800785 @default.
• W1989690411 cites W2081483142 @default.
• W1989690411 cites W2085065190 @default.
• W1989690411 cites W2085757249 @default.
• W1989690411 cites W2094788898 @default.
• W1989690411 cites W2148654915 @default.
• W1989690411 doi "https://doi.org/10.1116/1.1647593" @default.
• W1989690411 hasPublicationYear "2004" @default.
• W1989690411 type Work @default.
• W1989690411 sameAs 1989690411 @default.
• W1989690411 citedByCount "17" @default.
• W1989690411 countsByYear W19896904112012 @default.
• W1989690411 countsByYear W19896904112014 @default.
• W1989690411 countsByYear W19896904112016 @default.
• W1989690411 countsByYear W19896904112017 @default.
• W1989690411 countsByYear W19896904112018 @default.
• W1989690411 countsByYear W19896904112019 @default.
• W1989690411 countsByYear W19896904112022 @default.
• W1989690411 countsByYear W19896904112023 @default.
• W1989690411 crossrefType "journal-article" @default.
• W1989690411 hasAuthorship W1989690411A5004999029 @default.
• W1989690411 hasAuthorship W1989690411A5005386555 @default.
• W1989690411 hasAuthorship W1989690411A5020879259 @default.
• W1989690411 hasAuthorship W1989690411A5034051021 @default.
• W1989690411 hasAuthorship W1989690411A5053588158 @default.
• W1989690411 hasAuthorship W1989690411A5070926691 @default.
• W1989690411 hasConcept C113196181 @default.
• W1989690411 hasConcept C115961682 @default.
• W1989690411 hasConcept C137637335 @default.
• W1989690411 hasConcept C146088050 @default.
• W1989690411 hasConcept C154945302 @default.
• W1989690411 hasConcept C159985019 @default.
• W1989690411 hasConcept C171250308 @default.
• W1989690411 hasConcept C178790620 @default.
• W1989690411 hasConcept C185592680 @default.
• W1989690411 hasConcept C19067145 @default.
• W1989690411 hasConcept C191897082 @default.
• W1989690411 hasConcept C192562407 @default.
• W1989690411 hasConcept C194760766 @default.
• W1989690411 hasConcept C22423302 @default.
• W1989690411 hasConcept C2778112282 @default.
• W1989690411 hasConcept C2779227376 @default.
• W1989690411 hasConcept C2781195486 @default.
• W1989690411 hasConcept C41008148 @default.
• W1989690411 hasConcept C43617362 @default.
• W1989690411 hasConcept C514619126 @default.
• W1989690411 hasConcept C56052488 @default.
• W1989690411 hasConcept C61048295 @default.
• W1989690411 hasConcept C61427134 @default.
• W1989690411 hasConcept C8010536 @default.
• W1989690411 hasConceptScore W1989690411C113196181 @default.
• W1989690411 hasConceptScore W1989690411C115961682 @default.
• W1989690411 hasConceptScore W1989690411C137637335 @default.
• W1989690411 hasConceptScore W1989690411C146088050 @default.
• W1989690411 hasConceptScore W1989690411C154945302 @default.
• W1989690411 hasConceptScore W1989690411C159985019 @default.
• W1989690411 hasConceptScore W1989690411C171250308 @default.
• W1989690411 hasConceptScore W1989690411C178790620 @default.
• W1989690411 hasConceptScore W1989690411C185592680 @default.
• W1989690411 hasConceptScore W1989690411C19067145 @default.
• W1989690411 hasConceptScore W1989690411C191897082 @default.
• W1989690411 hasConceptScore W1989690411C192562407 @default.
• W1989690411 hasConceptScore W1989690411C194760766 @default.
• W1989690411 hasConceptScore W1989690411C22423302 @default.
• W1989690411 hasConceptScore W1989690411C2778112282 @default.
• W1989690411 hasConceptScore W1989690411C2779227376 @default.
• W1989690411 hasConceptScore W1989690411C2781195486 @default.
• W1989690411 hasConceptScore W1989690411C41008148 @default.
• W1989690411 hasConceptScore W1989690411C43617362 @default.
• W1989690411 hasConceptScore W1989690411C514619126 @default.
• W1989690411 hasConceptScore W1989690411C56052488 @default.
• W1989690411 hasConceptScore W1989690411C61048295 @default.
• W1989690411 hasConceptScore W1989690411C61427134 @default.
• W1989690411 hasConceptScore W1989690411C8010536 @default.

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