FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1989721285> ?p ?o ?g. }

• W1989721285 abstract "Carbon-free silicon dioxide has been deposited at room temperature by injection of pure hexamethyldisiloxane (HMDSO) into an atmospheric pressure microplasma jet from argon. At low HMDSO flow rates [&lt;0.1SCCM (SCCM denotes cubic centimeter per minute at STP)], the SiOxHz films contain no carbon and exhibit an oxygen to silicon ratio close to 2 according to x-ray photoelectron spectroscopy. At high HMDSO flow rates (&gt;0.1SCCM), SiOxCyHz films with a carbon content of up to 21% are obtained. The transition between organic to inorganic film is confirmed by Fourier transformed infrared spectroscopy. The deposition of inorganic films without oxygen admixture is explained by an ion-induced polymerization scheme of HMDSO." @default.
• W1989721285 created "2016-06-24" @default.
• W1989721285 creator A5048400398 @default.
• W1989721285 creator A5069362918 @default.
• W1989721285 creator A5090512909 @default.
• W1989721285 date "2008-03-03" @default.
• W1989721285 modified "2023-09-29" @default.
• W1989721285 title "Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet" @default.
• W1989721285 cites W121737710 @default.
• W1989721285 cites W1984796117 @default.
• W1989721285 cites W1991614017 @default.
• W1989721285 cites W1999685843 @default.
• W1989721285 cites W2000392301 @default.
• W1989721285 cites W2018075983 @default.
• W1989721285 cites W2018411799 @default.
• W1989721285 cites W2020628622 @default.
• W1989721285 cites W2032288282 @default.
• W1989721285 cites W2033185055 @default.
• W1989721285 cites W2033908464 @default.
• W1989721285 cites W2034028123 @default.
• W1989721285 cites W2034613884 @default.
• W1989721285 cites W2036812893 @default.
• W1989721285 cites W2052846163 @default.
• W1989721285 cites W2060577275 @default.
• W1989721285 cites W2065397226 @default.
• W1989721285 cites W2074267316 @default.
• W1989721285 cites W2078275590 @default.
• W1989721285 cites W2084904637 @default.
• W1989721285 cites W2134804715 @default.
• W1989721285 cites W2148418353 @default.
• W1989721285 cites W2153560899 @default.
• W1989721285 cites W2169790912 @default.
• W1989721285 cites W4381528 @default.
• W1989721285 doi "https://doi.org/10.1063/1.2844880" @default.
• W1989721285 hasPublicationYear "2008" @default.
• W1989721285 type Work @default.
• W1989721285 sameAs 1989721285 @default.
• W1989721285 citedByCount "60" @default.
• W1989721285 countsByYear W19897212852012 @default.
• W1989721285 countsByYear W19897212852013 @default.
• W1989721285 countsByYear W19897212852014 @default.
• W1989721285 countsByYear W19897212852015 @default.
• W1989721285 countsByYear W19897212852016 @default.
• W1989721285 countsByYear W19897212852017 @default.
• W1989721285 countsByYear W19897212852018 @default.
• W1989721285 countsByYear W19897212852020 @default.
• W1989721285 countsByYear W19897212852021 @default.
• W1989721285 countsByYear W19897212852022 @default.
• W1989721285 countsByYear W19897212852023 @default.
• W1989721285 crossrefType "journal-article" @default.
• W1989721285 hasAuthorship W1989721285A5048400398 @default.
• W1989721285 hasAuthorship W1989721285A5069362918 @default.
• W1989721285 hasAuthorship W1989721285A5090512909 @default.
• W1989721285 hasConcept C104779481 @default.
• W1989721285 hasConcept C111368507 @default.
• W1989721285 hasConcept C113196181 @default.
• W1989721285 hasConcept C121332964 @default.
• W1989721285 hasConcept C127313418 @default.
• W1989721285 hasConcept C127413603 @default.
• W1989721285 hasConcept C140205800 @default.
• W1989721285 hasConcept C151730666 @default.
• W1989721285 hasConcept C153642686 @default.
• W1989721285 hasConcept C159985019 @default.
• W1989721285 hasConcept C160892712 @default.
• W1989721285 hasConcept C175708663 @default.
• W1989721285 hasConcept C178790620 @default.
• W1989721285 hasConcept C185592680 @default.
• W1989721285 hasConcept C192562407 @default.
• W1989721285 hasConcept C200239111 @default.
• W1989721285 hasConcept C2776551725 @default.
• W1989721285 hasConcept C2816523 @default.
• W1989721285 hasConcept C42360764 @default.
• W1989721285 hasConcept C49040817 @default.
• W1989721285 hasConcept C544956773 @default.
• W1989721285 hasConcept C547737533 @default.
• W1989721285 hasConcept C62520636 @default.
• W1989721285 hasConcept C64297162 @default.
• W1989721285 hasConcept C70420769 @default.
• W1989721285 hasConcept C82706917 @default.
• W1989721285 hasConcept C86803240 @default.
• W1989721285 hasConceptScore W1989721285C104779481 @default.
• W1989721285 hasConceptScore W1989721285C111368507 @default.
• W1989721285 hasConceptScore W1989721285C113196181 @default.
• W1989721285 hasConceptScore W1989721285C121332964 @default.
• W1989721285 hasConceptScore W1989721285C127313418 @default.
• W1989721285 hasConceptScore W1989721285C127413603 @default.
• W1989721285 hasConceptScore W1989721285C140205800 @default.
• W1989721285 hasConceptScore W1989721285C151730666 @default.
• W1989721285 hasConceptScore W1989721285C153642686 @default.
• W1989721285 hasConceptScore W1989721285C159985019 @default.
• W1989721285 hasConceptScore W1989721285C160892712 @default.
• W1989721285 hasConceptScore W1989721285C175708663 @default.
• W1989721285 hasConceptScore W1989721285C178790620 @default.
• W1989721285 hasConceptScore W1989721285C185592680 @default.
• W1989721285 hasConceptScore W1989721285C192562407 @default.
• W1989721285 hasConceptScore W1989721285C200239111 @default.
• W1989721285 hasConceptScore W1989721285C2776551725 @default.
• W1989721285 hasConceptScore W1989721285C2816523 @default.
• W1989721285 hasConceptScore W1989721285C42360764 @default.
• W1989721285 hasConceptScore W1989721285C49040817 @default.

• next