Matches in SemOpenAlex for { <https://semopenalex.org/work/W1989740467> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W1989740467 endingPage "056501" @default.
- W1989740467 startingPage "056501" @default.
- W1989740467 abstract "Gallic acid was investigated as a new complexing agent for copper (Cu) chemical mechanical polishing slurries at neutral pH. Addition of 0.03 M gallic acid and 1.12 M H 2 O 2 at pH 7 resulted in a Cu removal rate of 560.73±17.49 nm/min, and the ratio of the Cu removal rate to the Cu dissolution rate was 14.8. Addition of gallic acid improved the slurry performance compared to glycine addition. X-ray photoelectron spectroscopy analysis and contact angle measurements showed that addition of gallic acid enhanced the Cu polishing behavior by suppressing the formation of surface Cu oxide." @default.
- W1989740467 created "2016-06-24" @default.
- W1989740467 creator A5002907437 @default.
- W1989740467 creator A5006634799 @default.
- W1989740467 creator A5049500608 @default.
- W1989740467 creator A5055053795 @default.
- W1989740467 date "2011-05-01" @default.
- W1989740467 modified "2023-10-16" @default.
- W1989740467 title "Gallic Acid as a Complexing Agent for Copper Chemical Mechanical Polishing Slurries at Neutral pH" @default.
- W1989740467 cites W1963800598 @default.
- W1989740467 cites W1978180480 @default.
- W1989740467 cites W1982937072 @default.
- W1989740467 cites W2012201395 @default.
- W1989740467 cites W2013754301 @default.
- W1989740467 cites W2025516664 @default.
- W1989740467 cites W2051310972 @default.
- W1989740467 cites W2052592507 @default.
- W1989740467 cites W2053356542 @default.
- W1989740467 cites W2067714612 @default.
- W1989740467 cites W2091494106 @default.
- W1989740467 cites W2101599272 @default.
- W1989740467 cites W2112027230 @default.
- W1989740467 cites W2950031466 @default.
- W1989740467 cites W4241293869 @default.
- W1989740467 doi "https://doi.org/10.1143/jjap.50.056501" @default.
- W1989740467 hasPublicationYear "2011" @default.
- W1989740467 type Work @default.
- W1989740467 sameAs 1989740467 @default.
- W1989740467 citedByCount "1" @default.
- W1989740467 countsByYear W19897404672013 @default.
- W1989740467 crossrefType "journal-article" @default.
- W1989740467 hasAuthorship W1989740467A5002907437 @default.
- W1989740467 hasAuthorship W1989740467A5006634799 @default.
- W1989740467 hasAuthorship W1989740467A5049500608 @default.
- W1989740467 hasAuthorship W1989740467A5055053795 @default.
- W1989740467 hasConcept C127413603 @default.
- W1989740467 hasConcept C138113353 @default.
- W1989740467 hasConcept C13965031 @default.
- W1989740467 hasConcept C159985019 @default.
- W1989740467 hasConcept C175708663 @default.
- W1989740467 hasConcept C178790620 @default.
- W1989740467 hasConcept C179104552 @default.
- W1989740467 hasConcept C180088628 @default.
- W1989740467 hasConcept C185592680 @default.
- W1989740467 hasConcept C191897082 @default.
- W1989740467 hasConcept C192562407 @default.
- W1989740467 hasConcept C197404232 @default.
- W1989740467 hasConcept C2778004101 @default.
- W1989740467 hasConcept C2778362808 @default.
- W1989740467 hasConcept C2779227376 @default.
- W1989740467 hasConcept C2779851234 @default.
- W1989740467 hasConcept C42360764 @default.
- W1989740467 hasConcept C544778455 @default.
- W1989740467 hasConcept C88380143 @default.
- W1989740467 hasConcept C94293008 @default.
- W1989740467 hasConceptScore W1989740467C127413603 @default.
- W1989740467 hasConceptScore W1989740467C138113353 @default.
- W1989740467 hasConceptScore W1989740467C13965031 @default.
- W1989740467 hasConceptScore W1989740467C159985019 @default.
- W1989740467 hasConceptScore W1989740467C175708663 @default.
- W1989740467 hasConceptScore W1989740467C178790620 @default.
- W1989740467 hasConceptScore W1989740467C179104552 @default.
- W1989740467 hasConceptScore W1989740467C180088628 @default.
- W1989740467 hasConceptScore W1989740467C185592680 @default.
- W1989740467 hasConceptScore W1989740467C191897082 @default.
- W1989740467 hasConceptScore W1989740467C192562407 @default.
- W1989740467 hasConceptScore W1989740467C197404232 @default.
- W1989740467 hasConceptScore W1989740467C2778004101 @default.
- W1989740467 hasConceptScore W1989740467C2778362808 @default.
- W1989740467 hasConceptScore W1989740467C2779227376 @default.
- W1989740467 hasConceptScore W1989740467C2779851234 @default.
- W1989740467 hasConceptScore W1989740467C42360764 @default.
- W1989740467 hasConceptScore W1989740467C544778455 @default.
- W1989740467 hasConceptScore W1989740467C88380143 @default.
- W1989740467 hasConceptScore W1989740467C94293008 @default.
- W1989740467 hasIssue "5R" @default.
- W1989740467 hasLocation W19897404671 @default.
- W1989740467 hasOpenAccess W1989740467 @default.
- W1989740467 hasPrimaryLocation W19897404671 @default.
- W1989740467 hasRelatedWork W126042870 @default.
- W1989740467 hasRelatedWork W1966830599 @default.
- W1989740467 hasRelatedWork W2034054684 @default.
- W1989740467 hasRelatedWork W2050141425 @default.
- W1989740467 hasRelatedWork W2072988759 @default.
- W1989740467 hasRelatedWork W2166995394 @default.
- W1989740467 hasRelatedWork W2181935354 @default.
- W1989740467 hasRelatedWork W2251549685 @default.
- W1989740467 hasRelatedWork W2375092685 @default.
- W1989740467 hasRelatedWork W2380871068 @default.
- W1989740467 hasVolume "50" @default.
- W1989740467 isParatext "false" @default.
- W1989740467 isRetracted "false" @default.
- W1989740467 magId "1989740467" @default.
- W1989740467 workType "article" @default.