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- W1990123173 abstract "TiNx films with various x values were prepared by ion beam-assisted deposition. The composition and structure of the films were investigated by Rutherford backscattering spectroscopy and X-ray diffraction (XRD). The results of XRD indicated that the films consisted of free α-Ti when x was less than 0.5. δ-TiNx films were formed when x was larger than 0.5. At critical value of x = 0.5, an amorphous film was obtained. For the δ-TiNx films, it was observed that the films had preferred orientation. The preferred orientation of the films changed from <111> to <100> with ion current density." @default.
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- W1990123173 date "1995-03-01" @default.
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- W1990123173 title "Structure of TiNx (0 < x < 1.1) films prepared by ion beam-assisted deposition" @default.
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- W1990123173 doi "https://doi.org/10.1016/0040-6090(94)06367-2" @default.
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