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- W1990150237 abstract "The successful fabrication and operation of microactuators and micromechanical parts by IC-based micromachining technology has provided the opportunity to produce microelectromechanical systems (MEMS) or micromachines. This paper deals with the recent progress in micromachining processes and microactuators fabricated by them. A system architecture suitable for MEMS and applications of MEMS are also discussed." @default.
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- W1990150237 title "Recent Progress in Micromachining and Applications to Microactuators" @default.
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- W1990150237 doi "https://doi.org/10.1143/jjap.33.7163" @default.
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