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• W1990182479 endingPage "105101" @default.
• W1990182479 startingPage "105101" @default.
• W1990182479 abstract "2?inch diameter homogeneous AlN films are epitaxially grown on sapphire substrates by pulsed laser deposition (PLD). By optimizing laser rastering and PLD growth conditions, the 2?inch diameter single-crystalline AlN films exhibit excellent thickness uniformity with root-mean-square (RMS) inhomogeneity less than 4.5% and very smooth surface with RMS roughness less than 1.53?nm. There is a maximum of 1.5?nm thick interfacial layer, if there is any, existing between the as-grown AlN and the pre-nitrided sapphire substrate, and the as-grown AlN films are almost fully relaxed only with a 0.26% in-plane compressive strain. The achievement of high-quality large-scale AlN films with uniform thickness and atomically abrupt interface is of great interest for the commercial development of AlN-based devices, particularly acoustic filters where abrupt heterointerfaces with substrates and flat surfaces for AlN films are highly desired." @default.
• W1990182479 created "2016-06-24" @default.
• W1990182479 creator A5009717743 @default.
• W1990182479 creator A5022583120 @default.
• W1990182479 creator A5052315803 @default.
• W1990182479 creator A5074007881 @default.
• W1990182479 date "2013-02-12" @default.
• W1990182479 modified "2023-10-16" @default.
• W1990182479 title "Epitaxial growth of 2 inch diameter homogeneous AlN single-crystalline films by pulsed laser deposition" @default.
• W1990182479 cites W1493113342 @default.
• W1990182479 cites W1646291341 @default.
• W1990182479 cites W1740891833 @default.
• W1990182479 cites W1968065658 @default.
• W1990182479 cites W1970017121 @default.
• W1990182479 cites W1971534932 @default.
• W1990182479 cites W1976624882 @default.
• W1990182479 cites W1982557745 @default.
• W1990182479 cites W1983044540 @default.
• W1990182479 cites W1983795066 @default.
• W1990182479 cites W1991591067 @default.
• W1990182479 cites W1991784498 @default.
• W1990182479 cites W2000459638 @default.
• W1990182479 cites W2003332493 @default.
• W1990182479 cites W2004672038 @default.
• W1990182479 cites W2017925122 @default.
• W1990182479 cites W2021407985 @default.
• W1990182479 cites W2024880910 @default.
• W1990182479 cites W2047705982 @default.
• W1990182479 cites W2050194409 @default.
• W1990182479 cites W2055674374 @default.
• W1990182479 cites W2058421783 @default.
• W1990182479 cites W2060011469 @default.
• W1990182479 cites W2061745717 @default.
• W1990182479 cites W2061845784 @default.
• W1990182479 cites W2093414752 @default.
• W1990182479 cites W3021434776 @default.
• W1990182479 doi "https://doi.org/10.1088/0022-3727/46/10/105101" @default.
• W1990182479 hasPublicationYear "2013" @default.
• W1990182479 type Work @default.
• W1990182479 sameAs 1990182479 @default.
• W1990182479 citedByCount "29" @default.
• W1990182479 countsByYear W19901824792014 @default.
• W1990182479 countsByYear W19901824792015 @default.
• W1990182479 countsByYear W19901824792016 @default.
• W1990182479 countsByYear W19901824792017 @default.
• W1990182479 countsByYear W19901824792018 @default.
• W1990182479 countsByYear W19901824792020 @default.
• W1990182479 countsByYear W19901824792021 @default.
• W1990182479 countsByYear W19901824792022 @default.
• W1990182479 countsByYear W19901824792023 @default.
• W1990182479 crossrefType "journal-article" @default.
• W1990182479 hasAuthorship W1990182479A5009717743 @default.
• W1990182479 hasAuthorship W1990182479A5022583120 @default.
• W1990182479 hasAuthorship W1990182479A5052315803 @default.
• W1990182479 hasAuthorship W1990182479A5074007881 @default.
• W1990182479 hasConcept C110738630 @default.
• W1990182479 hasConcept C120665830 @default.
• W1990182479 hasConcept C121332964 @default.
• W1990182479 hasConcept C127313418 @default.
• W1990182479 hasConcept C151730666 @default.
• W1990182479 hasConcept C171250308 @default.
• W1990182479 hasConcept C19067145 @default.
• W1990182479 hasConcept C192562407 @default.
• W1990182479 hasConcept C2779227376 @default.
• W1990182479 hasConcept C2816523 @default.
• W1990182479 hasConcept C37982897 @default.
• W1990182479 hasConcept C49040817 @default.
• W1990182479 hasConcept C520434653 @default.
• W1990182479 hasConcept C64297162 @default.
• W1990182479 hasConcept C66882249 @default.
• W1990182479 hasConcept C97355855 @default.
• W1990182479 hasConceptScore W1990182479C110738630 @default.
• W1990182479 hasConceptScore W1990182479C120665830 @default.
• W1990182479 hasConceptScore W1990182479C121332964 @default.
• W1990182479 hasConceptScore W1990182479C127313418 @default.
• W1990182479 hasConceptScore W1990182479C151730666 @default.
• W1990182479 hasConceptScore W1990182479C171250308 @default.
• W1990182479 hasConceptScore W1990182479C19067145 @default.
• W1990182479 hasConceptScore W1990182479C192562407 @default.
• W1990182479 hasConceptScore W1990182479C2779227376 @default.
• W1990182479 hasConceptScore W1990182479C2816523 @default.
• W1990182479 hasConceptScore W1990182479C37982897 @default.
• W1990182479 hasConceptScore W1990182479C49040817 @default.
• W1990182479 hasConceptScore W1990182479C520434653 @default.
• W1990182479 hasConceptScore W1990182479C64297162 @default.
• W1990182479 hasConceptScore W1990182479C66882249 @default.
• W1990182479 hasConceptScore W1990182479C97355855 @default.
• W1990182479 hasIssue "10" @default.
• W1990182479 hasLocation W19901824791 @default.
• W1990182479 hasOpenAccess W1990182479 @default.
• W1990182479 hasPrimaryLocation W19901824791 @default.
• W1990182479 hasRelatedWork W1779249657 @default.
• W1990182479 hasRelatedWork W2012783318 @default.
• W1990182479 hasRelatedWork W2035865932 @default.
• W1990182479 hasRelatedWork W2053697108 @default.
• W1990182479 hasRelatedWork W2093064365 @default.
• W1990182479 hasRelatedWork W2392441461 @default.
• W1990182479 hasRelatedWork W2540643115 @default.

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