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• W1990239519 abstract "Abstract In this paper we describe a method for the synthesis of SiC‐nanorods on different substrates by using chemical vapor deposition. Similar to the growth of single‐ and multi‐walled carbon nanotubes, SiC‐nanorods grow about a catalytically controlled process. Suitable catalysts are Fe, Ni, or Co. For the deposition we used a ferrocene [Fe(C5H5)2], a hydrocarbon (C6H6 or C6H14), and as the precursor for silicon, the liquid SiCl4. HRTEM‐investigations with EEL‐ and EDX‐spectroscopy show the well‐developed SiC‐nanorods. The yield of SiC is dependent on the gas phase composition, especially the concentration of ferrocene and the hydrogen excess. During on Si‐substrates branched nanorods are always formed with the catalyst particle on the tip; on WC/Co hardmetals an interaction can be observed between the catalyst Co and the SiCl4 (Co‐silicides)." @default.
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• W1990239519 date "2005-04-01" @default.
• W1990239519 modified "2023-10-18" @default.
• W1990239519 title "Synthesis of SiC Nanorods by Chemical Vapor Deposition" @default.
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• W1990239519 doi "https://doi.org/10.1081/fst-200039220" @default.
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