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- W1990274100 endingPage "41" @default.
- W1990274100 startingPage "37" @default.
- W1990274100 abstract "We studied the characteristics of two different types of planar cylindrical microwave launchers installed inside the vacuum chamber for the production of a large-area processing plasma. The microwave launcher consisted of a coaxial waveguide and a cylindrical planar cavity, inside which a large-area thin quartz plate was inserted. We tested two configurations of microwave launchers; one was a closed cylindrical cavity structure and the other was a leaky open cavity structure. With a 1.5 kW microwave source, we demonstrated the production of large-area, surface-wave plasma (SWP) using Ar gas. Using the microwave launcher with a leaky open cavity structure, a spatial uniformity of SWP within ±3.5% over 160 mm in radius was achieved at a pressure of 20 ∼ 30 Pa. Numerical analyses using the electromagnetic wave simulator, MAFIA, were also carried out to study the electric field distribution radiated from the microwave launcher and to explain the experimental results." @default.
- W1990274100 created "2016-06-24" @default.
- W1990274100 creator A5005337583 @default.
- W1990274100 creator A5012880090 @default.
- W1990274100 creator A5030300156 @default.
- W1990274100 creator A5042104765 @default.
- W1990274100 date "2005-12-02" @default.
- W1990274100 modified "2023-09-25" @default.
- W1990274100 title "Production of large-area surface-wave plasmas with an internally mounted planar cylindrical launcher" @default.
- W1990274100 cites W1964677019 @default.
- W1990274100 cites W2002411364 @default.
- W1990274100 cites W2002539448 @default.
- W1990274100 cites W2009708220 @default.
- W1990274100 cites W2030272701 @default.
- W1990274100 cites W2035676376 @default.
- W1990274100 cites W2042709120 @default.
- W1990274100 cites W2050720764 @default.
- W1990274100 cites W2052134346 @default.
- W1990274100 cites W2092170831 @default.
- W1990274100 cites W2093090387 @default.
- W1990274100 cites W2466814739 @default.
- W1990274100 cites W2470595790 @default.
- W1990274100 doi "https://doi.org/10.1088/0963-0252/15/1/006" @default.
- W1990274100 hasPublicationYear "2005" @default.
- W1990274100 type Work @default.
- W1990274100 sameAs 1990274100 @default.
- W1990274100 citedByCount "23" @default.
- W1990274100 countsByYear W19902741002012 @default.
- W1990274100 countsByYear W19902741002013 @default.
- W1990274100 countsByYear W19902741002014 @default.
- W1990274100 countsByYear W19902741002015 @default.
- W1990274100 countsByYear W19902741002016 @default.
- W1990274100 countsByYear W19902741002021 @default.
- W1990274100 countsByYear W19902741002022 @default.
- W1990274100 crossrefType "journal-article" @default.
- W1990274100 hasAuthorship W1990274100A5005337583 @default.
- W1990274100 hasAuthorship W1990274100A5012880090 @default.
- W1990274100 hasAuthorship W1990274100A5030300156 @default.
- W1990274100 hasAuthorship W1990274100A5042104765 @default.
- W1990274100 hasConcept C119599485 @default.
- W1990274100 hasConcept C120665830 @default.
- W1990274100 hasConcept C121332964 @default.
- W1990274100 hasConcept C121684516 @default.
- W1990274100 hasConcept C127413603 @default.
- W1990274100 hasConcept C134786449 @default.
- W1990274100 hasConcept C178635117 @default.
- W1990274100 hasConcept C186397771 @default.
- W1990274100 hasConcept C192562407 @default.
- W1990274100 hasConcept C200687136 @default.
- W1990274100 hasConcept C24890656 @default.
- W1990274100 hasConcept C38652104 @default.
- W1990274100 hasConcept C41008148 @default.
- W1990274100 hasConcept C44838205 @default.
- W1990274100 hasConcept C51221625 @default.
- W1990274100 hasConcept C62520636 @default.
- W1990274100 hasConcept C82706917 @default.
- W1990274100 hasConcept C84174578 @default.
- W1990274100 hasConceptScore W1990274100C119599485 @default.
- W1990274100 hasConceptScore W1990274100C120665830 @default.
- W1990274100 hasConceptScore W1990274100C121332964 @default.
- W1990274100 hasConceptScore W1990274100C121684516 @default.
- W1990274100 hasConceptScore W1990274100C127413603 @default.
- W1990274100 hasConceptScore W1990274100C134786449 @default.
- W1990274100 hasConceptScore W1990274100C178635117 @default.
- W1990274100 hasConceptScore W1990274100C186397771 @default.
- W1990274100 hasConceptScore W1990274100C192562407 @default.
- W1990274100 hasConceptScore W1990274100C200687136 @default.
- W1990274100 hasConceptScore W1990274100C24890656 @default.
- W1990274100 hasConceptScore W1990274100C38652104 @default.
- W1990274100 hasConceptScore W1990274100C41008148 @default.
- W1990274100 hasConceptScore W1990274100C44838205 @default.
- W1990274100 hasConceptScore W1990274100C51221625 @default.
- W1990274100 hasConceptScore W1990274100C62520636 @default.
- W1990274100 hasConceptScore W1990274100C82706917 @default.
- W1990274100 hasConceptScore W1990274100C84174578 @default.
- W1990274100 hasIssue "1" @default.
- W1990274100 hasLocation W19902741001 @default.
- W1990274100 hasOpenAccess W1990274100 @default.
- W1990274100 hasPrimaryLocation W19902741001 @default.
- W1990274100 hasRelatedWork W1785147454 @default.
- W1990274100 hasRelatedWork W1969222701 @default.
- W1990274100 hasRelatedWork W1979444625 @default.
- W1990274100 hasRelatedWork W2018637388 @default.
- W1990274100 hasRelatedWork W2063695705 @default.
- W1990274100 hasRelatedWork W2098394138 @default.
- W1990274100 hasRelatedWork W2147453749 @default.
- W1990274100 hasRelatedWork W2355383665 @default.
- W1990274100 hasRelatedWork W3087905758 @default.
- W1990274100 hasRelatedWork W4283021192 @default.
- W1990274100 hasVolume "15" @default.
- W1990274100 isParatext "false" @default.
- W1990274100 isRetracted "false" @default.
- W1990274100 magId "1990274100" @default.
- W1990274100 workType "article" @default.