Matches in SemOpenAlex for { <https://semopenalex.org/work/W1990274994> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W1990274994 abstract "As lithography still pushing toward to lower k imaging, traditional illumination source shapes may perform marginally in resolving complex layouts, freeform source shapes are expected to achieve better image quality. Illumination optimization as one of inverse lithography techniques attempts to synthesize the input source which leads to the desired output wafer pattern by inverting the forward model from mask to wafer. This paper proposes a method to optimize illumination by using simulated annealing algorithms (SA). A synthesis of the NILS values at multi-critical mask locations over a focus range is chose as the merit function. The advantage of the SA algorithm is that it can identify optimum source solutions without any additional apriori knowledge about lithographic processes. The results show that our method can provide great improvements in both image quality and DOF." @default.
- W1990274994 created "2016-06-24" @default.
- W1990274994 creator A5046774265 @default.
- W1990274994 creator A5060756190 @default.
- W1990274994 creator A5071697038 @default.
- W1990274994 date "2014-09-18" @default.
- W1990274994 modified "2023-09-23" @default.
- W1990274994 title "Source optimization using simulated annealing algorithm" @default.
- W1990274994 cites W2004847404 @default.
- W1990274994 cites W2064177635 @default.
- W1990274994 cites W2071134870 @default.
- W1990274994 cites W2086421467 @default.
- W1990274994 cites W2088784478 @default.
- W1990274994 cites W2089775496 @default.
- W1990274994 doi "https://doi.org/10.1117/12.2069398" @default.
- W1990274994 hasPublicationYear "2014" @default.
- W1990274994 type Work @default.
- W1990274994 sameAs 1990274994 @default.
- W1990274994 citedByCount "0" @default.
- W1990274994 crossrefType "proceedings-article" @default.
- W1990274994 hasAuthorship W1990274994A5046774265 @default.
- W1990274994 hasAuthorship W1990274994A5060756190 @default.
- W1990274994 hasAuthorship W1990274994A5071697038 @default.
- W1990274994 hasConcept C105487726 @default.
- W1990274994 hasConcept C111472728 @default.
- W1990274994 hasConcept C11413529 @default.
- W1990274994 hasConcept C115961682 @default.
- W1990274994 hasConcept C120665830 @default.
- W1990274994 hasConcept C121332964 @default.
- W1990274994 hasConcept C126980161 @default.
- W1990274994 hasConcept C138885662 @default.
- W1990274994 hasConcept C160671074 @default.
- W1990274994 hasConcept C171250308 @default.
- W1990274994 hasConcept C182873914 @default.
- W1990274994 hasConcept C192562407 @default.
- W1990274994 hasConcept C204223013 @default.
- W1990274994 hasConcept C207467116 @default.
- W1990274994 hasConcept C2524010 @default.
- W1990274994 hasConcept C2779227376 @default.
- W1990274994 hasConcept C31972630 @default.
- W1990274994 hasConcept C33923547 @default.
- W1990274994 hasConcept C41008148 @default.
- W1990274994 hasConcept C41794268 @default.
- W1990274994 hasConcept C53524968 @default.
- W1990274994 hasConcept C55020928 @default.
- W1990274994 hasConcept C75553542 @default.
- W1990274994 hasConceptScore W1990274994C105487726 @default.
- W1990274994 hasConceptScore W1990274994C111472728 @default.
- W1990274994 hasConceptScore W1990274994C11413529 @default.
- W1990274994 hasConceptScore W1990274994C115961682 @default.
- W1990274994 hasConceptScore W1990274994C120665830 @default.
- W1990274994 hasConceptScore W1990274994C121332964 @default.
- W1990274994 hasConceptScore W1990274994C126980161 @default.
- W1990274994 hasConceptScore W1990274994C138885662 @default.
- W1990274994 hasConceptScore W1990274994C160671074 @default.
- W1990274994 hasConceptScore W1990274994C171250308 @default.
- W1990274994 hasConceptScore W1990274994C182873914 @default.
- W1990274994 hasConceptScore W1990274994C192562407 @default.
- W1990274994 hasConceptScore W1990274994C204223013 @default.
- W1990274994 hasConceptScore W1990274994C207467116 @default.
- W1990274994 hasConceptScore W1990274994C2524010 @default.
- W1990274994 hasConceptScore W1990274994C2779227376 @default.
- W1990274994 hasConceptScore W1990274994C31972630 @default.
- W1990274994 hasConceptScore W1990274994C33923547 @default.
- W1990274994 hasConceptScore W1990274994C41008148 @default.
- W1990274994 hasConceptScore W1990274994C41794268 @default.
- W1990274994 hasConceptScore W1990274994C53524968 @default.
- W1990274994 hasConceptScore W1990274994C55020928 @default.
- W1990274994 hasConceptScore W1990274994C75553542 @default.
- W1990274994 hasLocation W19902749941 @default.
- W1990274994 hasOpenAccess W1990274994 @default.
- W1990274994 hasPrimaryLocation W19902749941 @default.
- W1990274994 hasRelatedWork W1964232789 @default.
- W1990274994 hasRelatedWork W1971691260 @default.
- W1990274994 hasRelatedWork W1991610979 @default.
- W1990274994 hasRelatedWork W1998677544 @default.
- W1990274994 hasRelatedWork W2003332974 @default.
- W1990274994 hasRelatedWork W2047661987 @default.
- W1990274994 hasRelatedWork W2066187782 @default.
- W1990274994 hasRelatedWork W2079616710 @default.
- W1990274994 hasRelatedWork W2091201258 @default.
- W1990274994 hasRelatedWork W2137848777 @default.
- W1990274994 hasRelatedWork W2160093801 @default.
- W1990274994 hasRelatedWork W2273878657 @default.
- W1990274994 hasRelatedWork W3033733028 @default.
- W1990274994 hasRelatedWork W3131871734 @default.
- W1990274994 hasRelatedWork W3174647626 @default.
- W1990274994 hasRelatedWork W3194515377 @default.
- W1990274994 hasRelatedWork W3214039183 @default.
- W1990274994 hasRelatedWork W1517017265 @default.
- W1990274994 hasRelatedWork W2144191147 @default.
- W1990274994 hasRelatedWork W2286554990 @default.
- W1990274994 isParatext "false" @default.
- W1990274994 isRetracted "false" @default.
- W1990274994 magId "1990274994" @default.
- W1990274994 workType "article" @default.