Matches in SemOpenAlex for { <https://semopenalex.org/work/W1990341111> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W1990341111 endingPage "2614" @default.
- W1990341111 startingPage "2614" @default.
- W1990341111 abstract "Interface electronic properties of silicon nitride (SiN x )/crystalline silicon (c-Si) are studied. The interface electronic properties are improved by changing NH 3 /SiH 4 flow ratios ( F NH3 / F SiH4 ) of a thin SiN x layer (≃6 nm in thickness) between c-Si and a thick SiN x layer (≃65 nm) deposited with F NH3 / F SiH4 =30, where both SiN x layers are formed by direct photochemical vapor deposition (photo-CVD). In the case of F NH3 / F SiH4 =120, the minimum interface-trap density and hysteresis obtained from the capacitance-voltage ( C – V ) characteristics of Al/thick SiN x /thin SiN x /c-Si diodes are 3 ×10 10 cm -2 cdotp eV -1 and 0.1 V, respectively. In the deposition of thin SiN x , the interface electronic properties are degraded by exposing Si x H y or N x H y species to a c-Si surface, where these species are produced by photodecomposition of NH 3 /SiH 4 gas mixtures. Injected carriers, which cause hysteresis of the C – V characteristics, are discussed in terms of the barrier height for tunneling and the number of interface traps." @default.
- W1990341111 created "2016-06-24" @default.
- W1990341111 creator A5011723351 @default.
- W1990341111 creator A5076238325 @default.
- W1990341111 creator A5080955317 @default.
- W1990341111 date "1996-05-01" @default.
- W1990341111 modified "2023-09-25" @default.
- W1990341111 title "Interface Electronic Properties between Silicon and Silicon Nitride Deposited by Direct Photochemical Vapor Deposition" @default.
- W1990341111 cites W1964296451 @default.
- W1990341111 cites W1973532776 @default.
- W1990341111 cites W1991947465 @default.
- W1990341111 cites W1992560476 @default.
- W1990341111 cites W2001021707 @default.
- W1990341111 cites W2051705560 @default.
- W1990341111 cites W2072702559 @default.
- W1990341111 cites W2120153288 @default.
- W1990341111 cites W4298339850 @default.
- W1990341111 doi "https://doi.org/10.1143/jjap.35.2614" @default.
- W1990341111 hasPublicationYear "1996" @default.
- W1990341111 type Work @default.
- W1990341111 sameAs 1990341111 @default.
- W1990341111 citedByCount "5" @default.
- W1990341111 crossrefType "journal-article" @default.
- W1990341111 hasAuthorship W1990341111A5011723351 @default.
- W1990341111 hasAuthorship W1990341111A5076238325 @default.
- W1990341111 hasAuthorship W1990341111A5080955317 @default.
- W1990341111 hasConcept C113196181 @default.
- W1990341111 hasConcept C121332964 @default.
- W1990341111 hasConcept C123299182 @default.
- W1990341111 hasConcept C151730666 @default.
- W1990341111 hasConcept C171250308 @default.
- W1990341111 hasConcept C185592680 @default.
- W1990341111 hasConcept C19067145 @default.
- W1990341111 hasConcept C192562407 @default.
- W1990341111 hasConcept C26873012 @default.
- W1990341111 hasConcept C2777431650 @default.
- W1990341111 hasConcept C2779227376 @default.
- W1990341111 hasConcept C2816523 @default.
- W1990341111 hasConcept C43617362 @default.
- W1990341111 hasConcept C49040817 @default.
- W1990341111 hasConcept C544956773 @default.
- W1990341111 hasConcept C57410435 @default.
- W1990341111 hasConcept C64297162 @default.
- W1990341111 hasConcept C86803240 @default.
- W1990341111 hasConceptScore W1990341111C113196181 @default.
- W1990341111 hasConceptScore W1990341111C121332964 @default.
- W1990341111 hasConceptScore W1990341111C123299182 @default.
- W1990341111 hasConceptScore W1990341111C151730666 @default.
- W1990341111 hasConceptScore W1990341111C171250308 @default.
- W1990341111 hasConceptScore W1990341111C185592680 @default.
- W1990341111 hasConceptScore W1990341111C19067145 @default.
- W1990341111 hasConceptScore W1990341111C192562407 @default.
- W1990341111 hasConceptScore W1990341111C26873012 @default.
- W1990341111 hasConceptScore W1990341111C2777431650 @default.
- W1990341111 hasConceptScore W1990341111C2779227376 @default.
- W1990341111 hasConceptScore W1990341111C2816523 @default.
- W1990341111 hasConceptScore W1990341111C43617362 @default.
- W1990341111 hasConceptScore W1990341111C49040817 @default.
- W1990341111 hasConceptScore W1990341111C544956773 @default.
- W1990341111 hasConceptScore W1990341111C57410435 @default.
- W1990341111 hasConceptScore W1990341111C64297162 @default.
- W1990341111 hasConceptScore W1990341111C86803240 @default.
- W1990341111 hasIssue "5R" @default.
- W1990341111 hasLocation W19903411111 @default.
- W1990341111 hasOpenAccess W1990341111 @default.
- W1990341111 hasPrimaryLocation W19903411111 @default.
- W1990341111 hasRelatedWork W1983699832 @default.
- W1990341111 hasRelatedWork W2084066880 @default.
- W1990341111 hasRelatedWork W2158118780 @default.
- W1990341111 hasRelatedWork W2275363478 @default.
- W1990341111 hasRelatedWork W2328924373 @default.
- W1990341111 hasRelatedWork W2356201124 @default.
- W1990341111 hasRelatedWork W2564534972 @default.
- W1990341111 hasRelatedWork W2896880581 @default.
- W1990341111 hasRelatedWork W2909146734 @default.
- W1990341111 hasRelatedWork W3177905752 @default.
- W1990341111 hasVolume "35" @default.
- W1990341111 isParatext "false" @default.
- W1990341111 isRetracted "false" @default.
- W1990341111 magId "1990341111" @default.
- W1990341111 workType "article" @default.