Matches in SemOpenAlex for { <https://semopenalex.org/work/W1990345488> ?p ?o ?g. }
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- W1990345488 endingPage "893" @default.
- W1990345488 startingPage "887" @default.
- W1990345488 abstract "Comprehensive measurements of charged particles and neutral radicals in an inductively coupled plasma (ICP) are performed to understand and control the etching process using a CF4/H2 gas. The electron density in the ICP reactor decreases exponentially in a downstream region while the most abundant ionic species CF+ increases in proportion to the rf power with the CF+3 density almost constant. The neutral radical diagnostics by appearance mass spectrometry indicate 10 times more F atoms and somewhat fewer CFx radicals (x=1–3) in ICP, compared with a high-pressure capacitively coupled plasma diode. Such a small ratio of the CFx density to the F density is possibly a cause of the low etch selectivity of SiO2 to Si in ICP etching. Two innovative methods to achieve the high selectivity in ICPs are demonstrated. One is wall heating (100–200 °C), which leads to a drastic increase in CFx densities with the F density almost constant. The other is a pulse modulation of rf power at 30–50 μs durations where the time-resolved measurement of electron temperatures indicates a 6 μs rise time and a 70 μs decay time. The density ratio CFx/F (x=2,3) increases with decreasing rf-on time. The mechanisms of the radical composition change and the resultant high selectivity in pulsed plasmas are discussed." @default.
- W1990345488 created "2016-06-24" @default.
- W1990345488 creator A5004373624 @default.
- W1990345488 creator A5037804650 @default.
- W1990345488 creator A5060203441 @default.
- W1990345488 creator A5089642171 @default.
- W1990345488 date "1995-05-01" @default.
- W1990345488 modified "2023-10-14" @default.
- W1990345488 title "Diagnostics and control of radicals in an inductively coupled etching reactor" @default.
- W1990345488 doi "https://doi.org/10.1116/1.579847" @default.
- W1990345488 hasPublicationYear "1995" @default.
- W1990345488 type Work @default.
- W1990345488 sameAs 1990345488 @default.
- W1990345488 citedByCount "113" @default.
- W1990345488 countsByYear W19903454882012 @default.
- W1990345488 countsByYear W19903454882013 @default.
- W1990345488 countsByYear W19903454882014 @default.
- W1990345488 countsByYear W19903454882015 @default.
- W1990345488 countsByYear W19903454882016 @default.
- W1990345488 countsByYear W19903454882017 @default.
- W1990345488 countsByYear W19903454882018 @default.
- W1990345488 countsByYear W19903454882019 @default.
- W1990345488 countsByYear W19903454882020 @default.
- W1990345488 countsByYear W19903454882021 @default.
- W1990345488 countsByYear W19903454882022 @default.
- W1990345488 countsByYear W19903454882023 @default.
- W1990345488 crossrefType "journal-article" @default.
- W1990345488 hasAuthorship W1990345488A5004373624 @default.
- W1990345488 hasAuthorship W1990345488A5037804650 @default.
- W1990345488 hasAuthorship W1990345488A5060203441 @default.
- W1990345488 hasAuthorship W1990345488A5089642171 @default.
- W1990345488 hasConcept C100460472 @default.
- W1990345488 hasConcept C107187091 @default.
- W1990345488 hasConcept C113196181 @default.
- W1990345488 hasConcept C118792377 @default.
- W1990345488 hasConcept C121332964 @default.
- W1990345488 hasConcept C125485243 @default.
- W1990345488 hasConcept C139066938 @default.
- W1990345488 hasConcept C161790260 @default.
- W1990345488 hasConcept C163258240 @default.
- W1990345488 hasConcept C178790620 @default.
- W1990345488 hasConcept C184779094 @default.
- W1990345488 hasConcept C185592680 @default.
- W1990345488 hasConcept C21881925 @default.
- W1990345488 hasConcept C2779227376 @default.
- W1990345488 hasConcept C43617362 @default.
- W1990345488 hasConcept C55493867 @default.
- W1990345488 hasConcept C62520636 @default.
- W1990345488 hasConcept C82706917 @default.
- W1990345488 hasConcept C95974651 @default.
- W1990345488 hasConceptScore W1990345488C100460472 @default.
- W1990345488 hasConceptScore W1990345488C107187091 @default.
- W1990345488 hasConceptScore W1990345488C113196181 @default.
- W1990345488 hasConceptScore W1990345488C118792377 @default.
- W1990345488 hasConceptScore W1990345488C121332964 @default.
- W1990345488 hasConceptScore W1990345488C125485243 @default.
- W1990345488 hasConceptScore W1990345488C139066938 @default.
- W1990345488 hasConceptScore W1990345488C161790260 @default.
- W1990345488 hasConceptScore W1990345488C163258240 @default.
- W1990345488 hasConceptScore W1990345488C178790620 @default.
- W1990345488 hasConceptScore W1990345488C184779094 @default.
- W1990345488 hasConceptScore W1990345488C185592680 @default.
- W1990345488 hasConceptScore W1990345488C21881925 @default.
- W1990345488 hasConceptScore W1990345488C2779227376 @default.
- W1990345488 hasConceptScore W1990345488C43617362 @default.
- W1990345488 hasConceptScore W1990345488C55493867 @default.
- W1990345488 hasConceptScore W1990345488C62520636 @default.
- W1990345488 hasConceptScore W1990345488C82706917 @default.
- W1990345488 hasConceptScore W1990345488C95974651 @default.
- W1990345488 hasIssue "3" @default.
- W1990345488 hasLocation W19903454881 @default.
- W1990345488 hasOpenAccess W1990345488 @default.
- W1990345488 hasPrimaryLocation W19903454881 @default.
- W1990345488 hasRelatedWork W1544774047 @default.
- W1990345488 hasRelatedWork W1619276345 @default.
- W1990345488 hasRelatedWork W1968067753 @default.
- W1990345488 hasRelatedWork W2039888619 @default.
- W1990345488 hasRelatedWork W2059112004 @default.
- W1990345488 hasRelatedWork W2089108734 @default.
- W1990345488 hasRelatedWork W2119343688 @default.
- W1990345488 hasRelatedWork W2120510924 @default.
- W1990345488 hasRelatedWork W2351160091 @default.
- W1990345488 hasRelatedWork W4235437029 @default.
- W1990345488 hasVolume "13" @default.
- W1990345488 isParatext "false" @default.
- W1990345488 isRetracted "false" @default.
- W1990345488 magId "1990345488" @default.
- W1990345488 workType "article" @default.