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- W1990364189 abstract "Anisotropic wet etching process is now widely used in MEMS fabrication. The etching characteristics, mechanism of etch-pit formations on both of {100} and {111} Si surfaces, and micro pyramid formation on the etched {100} surface is described in this review paper. Advanced processes for fabricating complicated 3-D structures by wet etching are also explained." @default.
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- W1990364189 date "2008-01-01" @default.
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- W1990364189 title "Anisotropic Wet Etching for Micro-Fabrication" @default.
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- W1990364189 doi "https://doi.org/10.1541/ieejsmas.128.341" @default.
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