Matches in SemOpenAlex for { <https://semopenalex.org/work/W1990376698> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W1990376698 endingPage "1436" @default.
- W1990376698 startingPage "1429" @default.
- W1990376698 abstract "This study presented a fine water spray technique to remove acidic/basic gas/particulate from the make-up air of a semiconductor manufacturing plant. The concentration of air pollutants was measured at the inlet and the outlet of the device with the help of HDS (Honeycomb Denuder System) samplers followed by sample analysis. Results show that the removal efficiency of the fine water spray device for gas pollutants, i.e., HF, HCl, HNO2, HNO3, SO2, and NH3 was higher than that for ionic species, i.e., Cl−,]] and] in fine particulates. For example, the removal efficiency was 85.7±7.8 and 66.2±22.3% for SO2 and NH3, respectively, whose inlet concentration ranged from 3.1±1.4 and 13.2±6.9 ppb, respectively. When gas pollutant concentration was at low level, it was observed that the concentration at the outlet was close to that at the inlet of the fine water spray device. This is due to the reduction of the concentration gradient at the gas–liquid interface, which lowers the absorption efficiency." @default.
- W1990376698 created "2016-06-24" @default.
- W1990376698 creator A5017081462 @default.
- W1990376698 creator A5030687683 @default.
- W1990376698 creator A5033597516 @default.
- W1990376698 date "2003-01-04" @default.
- W1990376698 modified "2023-10-16" @default.
- W1990376698 title "Removal of Air Pollutants in the Make-Up Air of a Semiconductor Plant by Fine Water Spray" @default.
- W1990376698 cites W1970407708 @default.
- W1990376698 cites W1978385434 @default.
- W1990376698 cites W1981867966 @default.
- W1990376698 cites W1992751075 @default.
- W1990376698 cites W1999335067 @default.
- W1990376698 cites W2053176573 @default.
- W1990376698 cites W2059698330 @default.
- W1990376698 cites W2085131960 @default.
- W1990376698 cites W2098043197 @default.
- W1990376698 doi "https://doi.org/10.1081/ss-120018818" @default.
- W1990376698 hasPublicationYear "2003" @default.
- W1990376698 type Work @default.
- W1990376698 sameAs 1990376698 @default.
- W1990376698 citedByCount "6" @default.
- W1990376698 countsByYear W19903766982012 @default.
- W1990376698 countsByYear W19903766982015 @default.
- W1990376698 countsByYear W19903766982017 @default.
- W1990376698 crossrefType "journal-article" @default.
- W1990376698 hasAuthorship W1990376698A5017081462 @default.
- W1990376698 hasAuthorship W1990376698A5030687683 @default.
- W1990376698 hasAuthorship W1990376698A5033597516 @default.
- W1990376698 hasConcept C107872376 @default.
- W1990376698 hasConcept C127413603 @default.
- W1990376698 hasConcept C178790620 @default.
- W1990376698 hasConcept C185592680 @default.
- W1990376698 hasConcept C201289731 @default.
- W1990376698 hasConcept C24245907 @default.
- W1990376698 hasConcept C78519656 @default.
- W1990376698 hasConcept C82685317 @default.
- W1990376698 hasConceptScore W1990376698C107872376 @default.
- W1990376698 hasConceptScore W1990376698C127413603 @default.
- W1990376698 hasConceptScore W1990376698C178790620 @default.
- W1990376698 hasConceptScore W1990376698C185592680 @default.
- W1990376698 hasConceptScore W1990376698C201289731 @default.
- W1990376698 hasConceptScore W1990376698C24245907 @default.
- W1990376698 hasConceptScore W1990376698C78519656 @default.
- W1990376698 hasConceptScore W1990376698C82685317 @default.
- W1990376698 hasIssue "6" @default.
- W1990376698 hasLocation W19903766981 @default.
- W1990376698 hasOpenAccess W1990376698 @default.
- W1990376698 hasPrimaryLocation W19903766981 @default.
- W1990376698 hasRelatedWork W194039179 @default.
- W1990376698 hasRelatedWork W1989197435 @default.
- W1990376698 hasRelatedWork W1997308064 @default.
- W1990376698 hasRelatedWork W1999467503 @default.
- W1990376698 hasRelatedWork W2124415910 @default.
- W1990376698 hasRelatedWork W2132471875 @default.
- W1990376698 hasRelatedWork W3020509638 @default.
- W1990376698 hasRelatedWork W3028051441 @default.
- W1990376698 hasRelatedWork W30701505 @default.
- W1990376698 hasRelatedWork W4246460144 @default.
- W1990376698 hasVolume "38" @default.
- W1990376698 isParatext "false" @default.
- W1990376698 isRetracted "false" @default.
- W1990376698 magId "1990376698" @default.
- W1990376698 workType "article" @default.