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- W1990541819 abstract "This paper presents a survey of our recent developments of experimental and modeling techniques for thin films and substrates. Investigations into roughness and scattering properties of components for the deep to extreme UV are described." @default.
- W1990541819 created "2016-06-24" @default.
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- W1990541819 date "2001-01-01" @default.
- W1990541819 modified "2023-09-23" @default.
- W1990541819 title "Roughness and scattering of coatings for DUV to EUV spectral regions" @default.
- W1990541819 doi "https://doi.org/10.1364/oic.2001.tha2" @default.
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