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• W1990544299 abstract "The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflections has been studied as a function of membrane thickness and d.c. bias. The total stress in the films and the piezoelectric constant, d31, have been derived by means of two different methods. The results are consistent with direct strain measurements by optical interferometry and with bulk ceramic values of identical composition." @default.
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• W1990544299 date "1996-05-01" @default.
• W1990544299 modified "2023-10-02" @default.
• W1990544299 title "Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions" @default.
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• W1990544299 doi "https://doi.org/10.1016/0924-4247(96)01139-9" @default.
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