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- W1990582744 abstract "Abstract Low-energy sputtering is studied through molecular dynamics (MD) and binary-collision approximation (BCA) simulations. First, MD simulations as a preliminary study are performed for 5 keV Ar impacts on a Cu target. When random numbers gave the direction of the target crystal axis for each impact, the total sputtering yield almost agreed with the experimental yield of a polycrystalline Cu target. Second, we performed MD and BCA simulations for self-sputtering of W with an incident energy of 100 eV and incident angles of 0°–85°. We found that the many-body collision results in high-yield sputtering at grazing incidence. The incident angle dependence of sputtering yields fade out for an MD result with a rough surface." @default.
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- W1990582744 date "2007-02-01" @default.
- W1990582744 modified "2023-10-02" @default.
- W1990582744 title "MD simulation of sputtering on surface index and surface roughness dependence" @default.
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- W1990582744 doi "https://doi.org/10.1016/j.nimb.2006.11.024" @default.
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