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- W1990585827 abstract "Our group has developed a surface roughness measuring system for supersmooth optics based on scanning tunneling microscopy techniques, which includes the assessment of two dimensional and three dimensional surface roughness parameters. The system has been applied to topographic mapping of superpolished Si wafer coated with single layer Mo film. The measuring precision of measured Rms, Ra and P-V value, if expressed with standards deviation (sigma) <SUB>s</SUB>, is 0.06 nm, 0.05 nm and 0.19 nm, respectively, which has achieved atomic resolution." @default.
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- W1990585827 date "1992-12-10" @default.
- W1990585827 modified "2023-09-23" @default.
- W1990585827 title "Scanning tunneling microscope to evaluate supersmooth surface roughness" @default.
- W1990585827 cites W1658230049 @default.
- W1990585827 doi "https://doi.org/10.1117/12.130727" @default.
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