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- W1990592914 abstract "A method for obtaining the reproducibility of the self-developed pattern of nitrocellulose by monitoring the absorption current was investigated. For the nitrocellulose films with 3 different thicknesses, the change of the absorption current and the progress of the self-development were observed as a function of the irradiation time of the focused ion beam (FIB). Using our method, line patterns with a good reproducibility were obtained independent of the thickness of the nitrocellulose film. The width of the aluminum lines fabricated by our method was 160nm." @default.
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- W1990592914 date "1988-09-01" @default.
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- W1990592914 title "Self-Development Properties of Nitrocellulose for Focused Ion Beam Lithography" @default.
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- W1990592914 doi "https://doi.org/10.1143/jjap.27.1764" @default.
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