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- W1990598314 abstract "We investigated thermally induced flatband voltage ( V FB ) instabilities with single noble metals (Pt, Ir, Pd), their binary metal (IrPt) and control TiN used for gate electrodes in metal oxide semiconductor devices with atomic layer deposited HfO 2 gate dielectric. As-deposited e-beam evaporated noble metals and sputtered TiN gated devices show near band-edge p-type metal–oxide–semiconductor (pMOS) characteristics and higher V FB than midgap value, respectively. After 450 °C at 30 min forming gas anneal, V FB of devices with e-beam evaporated single metals and sputtered TiN is substantially shifted toward mid-gap position, indicating thermally induced V FB instability. However, device with binary metal alloy gate shows suppressed V FB shifts and work-function as high as 4.95 eV is attained with 450 °C at 30 min FGA. It can be explained by oxygen diffusion within gate stack structure into interfacial layer (IL) between Si and HfO 2 during anneal, leading to thicker IL and vacancy generation in dielectric." @default.
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- W1990598314 date "2012-02-01" @default.
- W1990598314 modified "2023-09-27" @default.
- W1990598314 title "Suppressed Thermally Induced Flatband Voltage Instabilities with Binary Noble Metal Gated Metal–Oxide–Semiconductor Capacitors" @default.
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- W1990598314 doi "https://doi.org/10.1143/jjap.51.02ba05" @default.
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