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• W1990689097 endingPage "268" @default.
• W1990689097 startingPage "258" @default.
• W1990689097 abstract "Plasma immersion ion implantation (PIII) is a material modification technique for treating the near-surface regions of materials by implanting energetic ions from a plasma which surrounds the sample. In the last decade, this technique has experienced a rapid development. Research and development of plasma immersion ion implantation has focused in two main fields, treatment of metals for improved tribological performance, and modification of semiconductors. The present paper describes briefly the fundamentals of PIII, reviews the historical development, and discusses examples in the semiconductor field, including formation of ultra-shallow junctions, trenchwall doping, poly-silicon passivation, and separation by plasma ion implantation of oxygen (SPIMOX)." @default.
• W1990689097 created "2016-06-24" @default.
• W1990689097 creator A5055325600 @default.
• W1990689097 date "1998-09-01" @default.
• W1990689097 modified "2023-09-27" @default.
• W1990689097 title "Semiconductor processing by plasma immersion ion implantation" @default.
• W1990689097 cites W1969255931 @default.
• W1990689097 cites W1973186474 @default.
• W1990689097 cites W1983706256 @default.
• W1990689097 cites W1986514679 @default.
• W1990689097 cites W1995865275 @default.
• W1990689097 cites W1998097934 @default.
• W1990689097 cites W1998714822 @default.
• W1990689097 cites W2018167064 @default.
• W1990689097 cites W2024237519 @default.
• W1990689097 cites W2024401213 @default.
• W1990689097 cites W2024663233 @default.
• W1990689097 cites W2025435323 @default.
• W1990689097 cites W2026708577 @default.
• W1990689097 cites W2034663451 @default.
• W1990689097 cites W2034698592 @default.
• W1990689097 cites W2039660736 @default.
• W1990689097 cites W2048383535 @default.
• W1990689097 cites W2055323063 @default.
• W1990689097 cites W2055397870 @default.
• W1990689097 cites W2063406699 @default.
• W1990689097 cites W2065982884 @default.
• W1990689097 cites W2070903807 @default.
• W1990689097 cites W2070923269 @default.
• W1990689097 cites W2072303039 @default.
• W1990689097 cites W2080256573 @default.
• W1990689097 cites W2092053765 @default.
• W1990689097 cites W2095989944 @default.
• W1990689097 cites W2128511981 @default.
• W1990689097 cites W2131941189 @default.
• W1990689097 cites W2138422080 @default.
• W1990689097 cites W2138524849 @default.
• W1990689097 cites W2143644904 @default.
• W1990689097 cites W2313442256 @default.
• W1990689097 cites W2313807399 @default.
• W1990689097 cites W2315770286 @default.
• W1990689097 cites W2333566878 @default.
• W1990689097 cites W61428839 @default.
• W1990689097 doi "https://doi.org/10.1016/s0921-5093(98)00734-5" @default.
• W1990689097 hasPublicationYear "1998" @default.
• W1990689097 type Work @default.
• W1990689097 sameAs 1990689097 @default.
• W1990689097 citedByCount "24" @default.
• W1990689097 countsByYear W19906890972012 @default.
• W1990689097 countsByYear W19906890972014 @default.
• W1990689097 countsByYear W19906890972016 @default.
• W1990689097 countsByYear W19906890972017 @default.
• W1990689097 countsByYear W19906890972018 @default.
• W1990689097 countsByYear W19906890972020 @default.
• W1990689097 countsByYear W19906890972021 @default.
• W1990689097 crossrefType "journal-article" @default.
• W1990689097 hasAuthorship W1990689097A5055325600 @default.
• W1990689097 hasConcept C108225325 @default.
• W1990689097 hasConcept C115537861 @default.
• W1990689097 hasConcept C121332964 @default.
• W1990689097 hasConcept C127413603 @default.
• W1990689097 hasConcept C145148216 @default.
• W1990689097 hasConcept C171250308 @default.
• W1990689097 hasConcept C178790620 @default.
• W1990689097 hasConcept C185592680 @default.
• W1990689097 hasConcept C192562407 @default.
• W1990689097 hasConcept C2778702798 @default.
• W1990689097 hasConcept C2779227376 @default.
• W1990689097 hasConcept C33574316 @default.
• W1990689097 hasConcept C41823505 @default.
• W1990689097 hasConcept C42360764 @default.
• W1990689097 hasConcept C49040817 @default.
• W1990689097 hasConcept C544956773 @default.
• W1990689097 hasConcept C57863236 @default.
• W1990689097 hasConcept C62520636 @default.
• W1990689097 hasConcept C79635011 @default.
• W1990689097 hasConcept C82706917 @default.
• W1990689097 hasConceptScore W1990689097C108225325 @default.
• W1990689097 hasConceptScore W1990689097C115537861 @default.
• W1990689097 hasConceptScore W1990689097C121332964 @default.
• W1990689097 hasConceptScore W1990689097C127413603 @default.
• W1990689097 hasConceptScore W1990689097C145148216 @default.
• W1990689097 hasConceptScore W1990689097C171250308 @default.
• W1990689097 hasConceptScore W1990689097C178790620 @default.
• W1990689097 hasConceptScore W1990689097C185592680 @default.
• W1990689097 hasConceptScore W1990689097C192562407 @default.
• W1990689097 hasConceptScore W1990689097C2778702798 @default.
• W1990689097 hasConceptScore W1990689097C2779227376 @default.
• W1990689097 hasConceptScore W1990689097C33574316 @default.
• W1990689097 hasConceptScore W1990689097C41823505 @default.
• W1990689097 hasConceptScore W1990689097C42360764 @default.
• W1990689097 hasConceptScore W1990689097C49040817 @default.
• W1990689097 hasConceptScore W1990689097C544956773 @default.
• W1990689097 hasConceptScore W1990689097C57863236 @default.
• W1990689097 hasConceptScore W1990689097C62520636 @default.
• W1990689097 hasConceptScore W1990689097C79635011 @default.
• W1990689097 hasConceptScore W1990689097C82706917 @default.
• W1990689097 hasIssue "1-2" @default.

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