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- W1990727471 endingPage "L895" @default.
- W1990727471 startingPage "L895" @default.
- W1990727471 abstract "We have simulated the diffusion of boron (B) after ultra-low-energy implantation in silicon during post-implantation annealing, based on our model [M. Uematsu: Jpn. J. Appl. Phys. 38 (1999) 3433]. When the B concentration is not so high (lesssim1×10 21 cm -3 ), the experimental B depth profiles are fitted using the model with taking into account B segregation to silicon oxide at the surface. When the B concentration is very high (gtrsim1×10 21 cm -3 ), however, the simulation underestimates the diffusion, which is attributable to boron-enhanced diffusion. The self-interstitial emission from a silicon boride layer in the high B concentration region is taken into account, and the simulation well reproduces the experimental profiles." @default.
- W1990727471 created "2016-06-24" @default.
- W1990727471 creator A5035414131 @default.
- W1990727471 date "2000-09-01" @default.
- W1990727471 modified "2023-09-24" @default.
- W1990727471 title "Diffusion Simulation of Ultra-Low-Energy Implanted Boron in Silicon" @default.
- W1990727471 cites W1986188448 @default.
- W1990727471 cites W1989564944 @default.
- W1990727471 cites W2000281775 @default.
- W1990727471 cites W2019976417 @default.
- W1990727471 cites W2026109148 @default.
- W1990727471 cites W2029296473 @default.
- W1990727471 cites W2034713953 @default.
- W1990727471 cites W2037790842 @default.
- W1990727471 cites W2081243026 @default.
- W1990727471 cites W2082840569 @default.
- W1990727471 cites W2089689839 @default.
- W1990727471 cites W2130345765 @default.
- W1990727471 cites W2170252914 @default.
- W1990727471 cites W2332774404 @default.
- W1990727471 doi "https://doi.org/10.1143/jjap.39.l895" @default.
- W1990727471 hasPublicationYear "2000" @default.
- W1990727471 type Work @default.
- W1990727471 sameAs 1990727471 @default.
- W1990727471 citedByCount "5" @default.
- W1990727471 crossrefType "journal-article" @default.
- W1990727471 hasAuthorship W1990727471A5035414131 @default.
- W1990727471 hasConcept C113196181 @default.
- W1990727471 hasConcept C121332964 @default.
- W1990727471 hasConcept C178790620 @default.
- W1990727471 hasConcept C184779094 @default.
- W1990727471 hasConcept C185592680 @default.
- W1990727471 hasConcept C191897082 @default.
- W1990727471 hasConcept C192562407 @default.
- W1990727471 hasConcept C2776408459 @default.
- W1990727471 hasConcept C2776723582 @default.
- W1990727471 hasConcept C2777431650 @default.
- W1990727471 hasConcept C2777855556 @default.
- W1990727471 hasConcept C2779105228 @default.
- W1990727471 hasConcept C2779851234 @default.
- W1990727471 hasConcept C2779889077 @default.
- W1990727471 hasConcept C2989164559 @default.
- W1990727471 hasConcept C41999313 @default.
- W1990727471 hasConcept C43617362 @default.
- W1990727471 hasConcept C49040817 @default.
- W1990727471 hasConcept C501308230 @default.
- W1990727471 hasConcept C544956773 @default.
- W1990727471 hasConcept C69357855 @default.
- W1990727471 hasConcept C97355855 @default.
- W1990727471 hasConceptScore W1990727471C113196181 @default.
- W1990727471 hasConceptScore W1990727471C121332964 @default.
- W1990727471 hasConceptScore W1990727471C178790620 @default.
- W1990727471 hasConceptScore W1990727471C184779094 @default.
- W1990727471 hasConceptScore W1990727471C185592680 @default.
- W1990727471 hasConceptScore W1990727471C191897082 @default.
- W1990727471 hasConceptScore W1990727471C192562407 @default.
- W1990727471 hasConceptScore W1990727471C2776408459 @default.
- W1990727471 hasConceptScore W1990727471C2776723582 @default.
- W1990727471 hasConceptScore W1990727471C2777431650 @default.
- W1990727471 hasConceptScore W1990727471C2777855556 @default.
- W1990727471 hasConceptScore W1990727471C2779105228 @default.
- W1990727471 hasConceptScore W1990727471C2779851234 @default.
- W1990727471 hasConceptScore W1990727471C2779889077 @default.
- W1990727471 hasConceptScore W1990727471C2989164559 @default.
- W1990727471 hasConceptScore W1990727471C41999313 @default.
- W1990727471 hasConceptScore W1990727471C43617362 @default.
- W1990727471 hasConceptScore W1990727471C49040817 @default.
- W1990727471 hasConceptScore W1990727471C501308230 @default.
- W1990727471 hasConceptScore W1990727471C544956773 @default.
- W1990727471 hasConceptScore W1990727471C69357855 @default.
- W1990727471 hasConceptScore W1990727471C97355855 @default.
- W1990727471 hasIssue "9A" @default.
- W1990727471 hasLocation W19907274711 @default.
- W1990727471 hasOpenAccess W1990727471 @default.
- W1990727471 hasPrimaryLocation W19907274711 @default.
- W1990727471 hasRelatedWork W1989564944 @default.
- W1990727471 hasRelatedWork W1990727471 @default.
- W1990727471 hasRelatedWork W1994906114 @default.
- W1990727471 hasRelatedWork W2024757488 @default.
- W1990727471 hasRelatedWork W2048269824 @default.
- W1990727471 hasRelatedWork W2063677047 @default.
- W1990727471 hasRelatedWork W2081643442 @default.
- W1990727471 hasRelatedWork W2088081281 @default.
- W1990727471 hasRelatedWork W2091143923 @default.
- W1990727471 hasRelatedWork W2163983516 @default.
- W1990727471 hasVolume "39" @default.
- W1990727471 isParatext "false" @default.
- W1990727471 isRetracted "false" @default.
- W1990727471 magId "1990727471" @default.
- W1990727471 workType "article" @default.