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- W1990837097 abstract "Optical actuation and detection of MEMS resonators can improve the resolution of their motion detection compared to standard detection techniques (capacitive, piezoelectric). In this paper, a behavioral model of MEMS resonator with optical actuation and detection and the associated oscillator circuit are presented and used to determine its performances." @default.
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- W1990837097 date "2012-05-01" @default.
- W1990837097 modified "2023-10-03" @default.
- W1990837097 title "Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations" @default.
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- W1990837097 doi "https://doi.org/10.1109/fcs.2012.6243656" @default.
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