Matches in SemOpenAlex for { <https://semopenalex.org/work/W1990877671> ?p ?o ?g. }
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- W1990877671 endingPage "2778" @default.
- W1990877671 startingPage "2775" @default.
- W1990877671 abstract "Metal thin-film patterning is of technological significance because modern electronic devices commonly require an electrode or metallization pattern. There are many cases where this pattern consists of two different metallic layers in order to improve the mechanical and electrical contact. We here show that double-layered metal thin films evaporated on glass can be directly patterned by a spatially-modulated pulsed Nd–YAG laser beam incident from the backside of the substrate. This method utilizes a pulsed laser-induced thermo-elastic force exerting on the film which plays a role to detach it from the substrate. Since the film is polycrystalline with nano-sized grains, a spatially-modulated thermo-elastic force may enable selective removal of the material by shearing along the weakly-bonded grain boundary regions. Many different combinations of Al, Ag, and Au layers have been investigated and their pattern fidelity and morphology are discussed, along with the simulation results for double-layered nanocystalline films." @default.
- W1990877671 created "2016-06-24" @default.
- W1990877671 creator A5034351813 @default.
- W1990877671 creator A5043230119 @default.
- W1990877671 creator A5045544004 @default.
- W1990877671 date "2010-03-01" @default.
- W1990877671 modified "2023-09-26" @default.
- W1990877671 title "Direct patterning of double-layered metal thin films by a pulsed Nd:YAG laser beam" @default.
- W1990877671 cites W1985299789 @default.
- W1990877671 cites W1988735611 @default.
- W1990877671 cites W1999252429 @default.
- W1990877671 cites W2029127959 @default.
- W1990877671 cites W2054475943 @default.
- W1990877671 cites W2062116934 @default.
- W1990877671 cites W2088126475 @default.
- W1990877671 cites W2090467568 @default.
- W1990877671 cites W2108380844 @default.
- W1990877671 cites W2111001399 @default.
- W1990877671 cites W2111654399 @default.
- W1990877671 cites W2145662152 @default.
- W1990877671 cites W2152620209 @default.
- W1990877671 doi "https://doi.org/10.1016/j.tsf.2009.10.018" @default.
- W1990877671 hasPublicationYear "2010" @default.
- W1990877671 type Work @default.
- W1990877671 sameAs 1990877671 @default.
- W1990877671 citedByCount "12" @default.
- W1990877671 countsByYear W19908776712012 @default.
- W1990877671 countsByYear W19908776712013 @default.
- W1990877671 countsByYear W19908776712014 @default.
- W1990877671 countsByYear W19908776712016 @default.
- W1990877671 countsByYear W19908776712019 @default.
- W1990877671 countsByYear W19908776712020 @default.
- W1990877671 crossrefType "journal-article" @default.
- W1990877671 hasAuthorship W1990877671A5034351813 @default.
- W1990877671 hasAuthorship W1990877671A5043230119 @default.
- W1990877671 hasAuthorship W1990877671A5045544004 @default.
- W1990877671 hasConcept C111368507 @default.
- W1990877671 hasConcept C120665830 @default.
- W1990877671 hasConcept C121332964 @default.
- W1990877671 hasConcept C127313418 @default.
- W1990877671 hasConcept C137637335 @default.
- W1990877671 hasConcept C147789679 @default.
- W1990877671 hasConcept C152279782 @default.
- W1990877671 hasConcept C159985019 @default.
- W1990877671 hasConcept C171250308 @default.
- W1990877671 hasConcept C17525397 @default.
- W1990877671 hasConcept C185592680 @default.
- W1990877671 hasConcept C19067145 @default.
- W1990877671 hasConcept C191897082 @default.
- W1990877671 hasConcept C192562407 @default.
- W1990877671 hasConcept C2777289219 @default.
- W1990877671 hasConcept C49040817 @default.
- W1990877671 hasConcept C520434653 @default.
- W1990877671 hasConceptScore W1990877671C111368507 @default.
- W1990877671 hasConceptScore W1990877671C120665830 @default.
- W1990877671 hasConceptScore W1990877671C121332964 @default.
- W1990877671 hasConceptScore W1990877671C127313418 @default.
- W1990877671 hasConceptScore W1990877671C137637335 @default.
- W1990877671 hasConceptScore W1990877671C147789679 @default.
- W1990877671 hasConceptScore W1990877671C152279782 @default.
- W1990877671 hasConceptScore W1990877671C159985019 @default.
- W1990877671 hasConceptScore W1990877671C171250308 @default.
- W1990877671 hasConceptScore W1990877671C17525397 @default.
- W1990877671 hasConceptScore W1990877671C185592680 @default.
- W1990877671 hasConceptScore W1990877671C19067145 @default.
- W1990877671 hasConceptScore W1990877671C191897082 @default.
- W1990877671 hasConceptScore W1990877671C192562407 @default.
- W1990877671 hasConceptScore W1990877671C2777289219 @default.
- W1990877671 hasConceptScore W1990877671C49040817 @default.
- W1990877671 hasConceptScore W1990877671C520434653 @default.
- W1990877671 hasFunder F4320322120 @default.
- W1990877671 hasFunder F4320322349 @default.
- W1990877671 hasIssue "10" @default.
- W1990877671 hasLocation W19908776711 @default.
- W1990877671 hasOpenAccess W1990877671 @default.
- W1990877671 hasPrimaryLocation W19908776711 @default.
- W1990877671 hasRelatedWork W2014315543 @default.
- W1990877671 hasRelatedWork W2051270029 @default.
- W1990877671 hasRelatedWork W2082293200 @default.
- W1990877671 hasRelatedWork W2137307547 @default.
- W1990877671 hasRelatedWork W2380293314 @default.
- W1990877671 hasRelatedWork W2943188944 @default.
- W1990877671 hasRelatedWork W3008690834 @default.
- W1990877671 hasRelatedWork W3082440218 @default.
- W1990877671 hasRelatedWork W4242480814 @default.
- W1990877671 hasRelatedWork W4285802202 @default.
- W1990877671 hasVolume "518" @default.
- W1990877671 isParatext "false" @default.
- W1990877671 isRetracted "false" @default.
- W1990877671 magId "1990877671" @default.
- W1990877671 workType "article" @default.